1. A Monolithic CMOS Microhotplate-Based Gas Sensor System
Muhammad Y. Afridi
John S. Suehle
Mona E. Zaghloul
David W. Berning
Allen R. Hefner
Elliott Cooper-Balis

2. MEMS Overview
The integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro-fabrication technology

3. Gas Sensor Motivations
Use existing CMOS technology
Low power
Low cost
Reliable detection
Applications :
Detection of harmful substances in public places
Detection of freshness of food
Detection of toxic leaks in manufacturing facilities

4. Microhotplate Gas Sensor
Key Features :
Suspended trampoline structure
Polysilicon resistor heating element (2-kΩ)
Metal-oxide film-based sensing element (Tin or Titanium)

5. Microhotplate Gas Sensor

6. Gas Sensor System

7. Gas Sensor System

8. Gas Sensor System

9. Gas Sensor System

10. Gas Sensor System

11. Thank You!