1. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: Study on Microgratings Using Imaging, Spectroscopic, and Fourier Lens Scatterometry
J. Micro Nano-Manuf. 2017;5(3): doi: /
Figure Legend:
BRDF measurements obtained with the Fourier lens system at a wavelength of 550 nm: (a) 1D grating with a pitch of 4 μm and a height of around 500 nm and (b) quadratic 2D grating with a pitch of 2 μm. The different diffraction orders are indicated. The parasitic light arises from multiple reflections in the optics and is avoided in the data analysis.