1. Date of download: 10/7/2017
Copyright © ASME. All rights reserved.
From: ArF Excimer Laser Micromachining of MEMS Materials: Characterization and Applications
J. Micro Nano-Manuf. 2014;2(2): doi: /
Figure Legend:
ArF micromachining of flexible braided neural probe: (a) SEM image of a bundle of braided wires cut by excimer laser, (b) schematic drawing of a single nichrome wire with polyimide insulation layer, (c) microscopic image of a braided nichrome wires cut by scissors, (d) SEM image of local removal of insulation layer on single nichrome wire using ArF excimer laser, (e) SEM image of local removal of insulation layer on single nichrome wire using KrF excimer laser, (f) SEM image of single nichrome wire cut by ArF excimer laser, and (g) SEM image of single nichrome wire cut by KrF excimer laser