1. Sensera Operations Manager
Introduction to MEMS by
Tim Stucchi
Sensera Operations Manager

2. MEMS vs. Dust Mite vs. Ant’s Leg
Micro-Electro-Mechanical-Systems
A technique of fabricating Electrical and Mechanical elements on a
chip with miniature dimensions
Miniature means dimensions less than the width of a human hair
(<100 microns; 1 um = inches).
MEMS vs. Dust Mite vs. Ant’s Leg

3. MEMS & Nano Scale
A 6’ man is 1.83 meters or 1.83M um

4. How are MEMS Made? 4

5. MEMS Micromachining Semi Isolated Features
Electrostatic comb actuator/Surface Acoustic Wave Transducer 5
Elements of Microfluidic pump

6. Examples of MEMS Devices
Accelerometer
Resonator
Probe
Robotic Hands
Micro mirrors
Biopsy forceps 6

7. MEMS Devices are Everywhere
Automotive
Mobile Electronics
Communications
Biomedical

8. MEMS Market Segments

9. A Field Sales Company 25 Webb Street Middleton, MA 01949-1724
Marriage Counselor for Manufacturers®
A Field Sales Company 25 Webb Street Middleton, MA
John M. Knott
President
Office:
Mobile:
Sales Agent for Sensera