1. Funded by National Science Foundation
Research Project
Improving Sustainability of Atomic Layer Deposition: a Hierarchical Systems Approach
Funded by National Science Foundation
Funding: $457,902
Funding period: 08/1/ /31/2015

2. Introduction
Atomic Layer Deposition (ALD): the most accurate nano-scale manufacturing technology for fabricating atomic-scale thin films.
Wide Applications:
Microelectronics
Solar Cells
Fuel Cells
Lithium ion batteries
MEMS
OLED
Photonics
Catalysts
Biomedical devices
and many other applications
(Courtesy: Cambridge Nanotech Inc.)

3. ALD of Al2O3 Nano-Scale Thin Films
2Al(CH3)3 +3 H2O  Al2O3 + 6CH4
Result nm
Atomic Layer Deposition of Al2O3: 2Al(CH3)3 + 3H2O  Al2O3 + 6CH4
Silicon Wafer
Pulsing H2O to hydroxylate Si Wafer
Step 1
Step 3
Pulsing
Emission
Surface Roughness < 0.3 nm
Pulsing H2O to react with Al(CH3)3
Pulsing Al(CH3)3 on hydroxylated Si Wafer
Step 2
H2O
Al(CH3)3

4. Research on Improving Sustainability of ALD
Three research objectives:
Objective 1: Mathematical modeling and experimental investigations of ALD process emissions
1.1. Modeling and validating the ALD precursor use and emission generations
1.2. Experimental investigations of ALD nano-particle emissions
Objective 2: Thermodynamic flows and energy modeling of ALD nano-manufacturing system
2.1 Modeling thermodynamic energy flows in ALD system
2.2. Development of a mathematical energy model for ALD system
Objective 3: Sustainable scale-up of ALD nanotechnology for industrial productions
3.1. Sustainability of batch-size ALD production system
3.2. Sustainable development of roll-to-roll fast ALD nano-manufacturing technology

5. Objective 1: Modeling and Test ALD Emissions
1.1. Modeling and validating the ALD precursor use and emission generations
Boltzmann equation:
1.2. Experimental investigations of
ALD nano-particle emissions

6. Objective 2: Thermodynamic Analysis of ALD
2.1 Modeling thermodynamic energy flows in ALD system
Navier-Stokes equations:
2.2. Development of a mathematical
energy model for ALD system
Energy consumption of ALD Al2O3

7. Objective 3: Sustainable Scale-up of ALD
3.1 Sustainability of batch-size ALD production system
3.2. Sustainable development of roll-to-roll fast ALD nano-manufacturing technology
Precursors
Electricity
Substrates
Products
By-products
Emissions/Wastes