Download presentation
Presentation is loading. Please wait.
1
XPS X-ray Photoelectron Spectroscopy
Copyright 2016 University Instrumentation Center UNH-Durham, NH Parsons Hall 23 Academic Way Form # rev. AA 8/1/2016 Created by: John Wilderman
2
University Instrumentation Center
Who We Are What We Do Contact Information Emergency Contact Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
3
What is XPS? X-ray Photoelectron Spectroscopy is an analysis technique used for determining elemental composition on surfaces of solid samples. This technique is both Qualitative and Quantitative. Detects Elements between Lithium (3) and Lawrencium (103). Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
5
How does XPS Work XPS uses X-rays to dislodge electrons from the shells of the molecules and the resulting photoelectrons are collected, counted, and their kinetic energy measured to determine the elements they were dislodged from. Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
6
Photoelectron Pathway Copyright 2016 Form #1714100 rev. AA
University Instrumentation Center UNH Form # rev. AA 8/1/2016
7
Chamber Section Form # rev. AA 8/1/2016
8
XPS Analysis Types Surface Composition Surface Contaminates
Coating Uniformity (mapping) Depth Profiling (ion etch) Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
9
Sample Composition Good Samples Inorganic Compounds Metals
Metal Alloys Polymers Glasses Ceramics Carbon Fly ash Inks Wood Paints Not So Good Samples Brass Soft Polymers Adhesives Epoxies Bad Samples Liquids Water based items Porous Materials Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
10
Vacuum Pressure Units Torr PSI Pascals Bars mmHg mmH2O inH2O inHg
Absolute vs. Gauge 760 Torr = 14.7 psi Rough Vacuum 10-1 Torr Medium Vacuum 10-3 Torr High Vacuum 10-6 Torr Ultra High Vacuum 10-8 Torr Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
11
1 Mile Wide x 1Mile Long x 1 Foot Tall
Volume Expansion Cleanliness Dust Finger Prints PV=T Torr 7.6 x 108 L @ 10-9 Torr 1 Mile Wide x 1Mile Long x 1 Foot Tall Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
12
XPS Safety X-rays High Voltage (15KV) Cooling Water
Vacuum System (ion and turbo pump) Sample Loading/Unloading Laser (He Ne) Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
13
XPS Hardware Form # rev. AA 8/1/2016
14
Hardware Vacuum Pumps Roughing Pump Turbo Pump Ion Pump Copyright 2016
University Instrumentation Center UNH Form # rev. AA 8/1/2016
15
Hardware Valves Gate Valve Roughing Valve Vent Valve Fore Line Valve
Differential Pumping Valve Turbo Isolation Valve Argon Valve Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
16
Hardware Pressure Gauges Ion Gauge TC 1 Roughing TC 2 Turbo Backing
Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
18
Hardware X-ray Guns Dual Mg Al Gun Mono Al Gun Copyright 2016
University Instrumentation Center UNH Form # rev. AA 8/1/2016
19
Cleaning oxides off sample
Hardware Ion Etch Gun Cleaning oxides off sample Depth profiling Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
20
Hardware Sample Manipulator X Micrometer Y Micrometer Z Micrometer
Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
21
Hardware Spot Apertures Slot M 120 Micron 60 Micron 30 Micron
Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
22
Hardware Iris 0.350 30 0.500 60 0.850 120 1.000 Slot M Copyright 2016
Slot M Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
23
Photoelectron Pathway Copyright 2016 Form #1714100 rev. AA
University Instrumentation Center UNH Form # rev. AA 8/1/2016
24
Hardware Laser Z-axis alignment of Sample Copyright 2016
University Instrumentation Center UNH Form # rev. AA 8/1/2016
25
Used for Alignment of sample in all three axis
Hardware Camera Used for Alignment of sample in all three axis Video monitor Charge balance Laser Power Scan Rotation Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
26
Electronics Main Power Ion gage Controller Emission Stabilizer
Charge Neutralizer Sample Stage Temp Controller Ion Etch Gun Controller Magnet Power Supply High Voltage Power Supply Ion Pump Controller Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
27
Computer System Sun/UNIX Graphical Interface Remotely runs Hardware
Stores Spectra Off Load Print Copyright 2016 University Instrumentation Center UNH Form # rev. AA 8/1/2016
28
Control Software Copyright 2016 University Instrumentation Center UNH
Form # rev. AA 8/1/2016
29
Processing Software Copyright 2016
University Instrumentation Center UNH Form # rev. AA 8/1/2016
30
Processing Software Copyright 2016
University Instrumentation Center UNH Form # rev. AA 8/1/2016
31
Form # rev. AA 8/1/2016
Similar presentations
