1. Institute of Physics & Technology
Russian Academy
of Sciences
Director academicion Kamil Valiev

2. IPT RAS Lab of Microstructuring & Submicron Devices Lab of MEMS
Lab of Micro- and Nanostructures Characterization
Lab of Technological Processes Simulation
Lab of Quantum Computers Physics

3. IPT RAS: Main fields of Activities
Fundamental
Quantum computers physics
Low temperature plasma physics
Semiconductors devices physics
Nanomagnetics physics
X-ray diffraction theory
Applied
HDP based processing
HDP and ion sources
Equipments for deposition, etching, and ion implantation
Plasma diagnostics and end-point detection
Metals and silicides
Modelling of technological processes and devices