1. By: Thomas Thao EE 4611: Introduction to Semiconductors
MEMS, Sensor
By: Thomas Thao
EE 4611: Introduction to Semiconductors

2. Overview What does MEMs Stand for? Materials for MEMS Manufacturing
Video Description of MEMS Sensors
Applications
Products of Sensors
Five Takeaways

3. What does MEM stand for? Micro-electromechanical systems (MEMS)
They are miniaturized mechanical and electro-mechanical elements that are made using the techniques of microfabrication

4. Materials for MEMS Manufacturing
Silicon
Polymers
Metals
Ceramics

5. Video: MEMS Sensors

6. Applications Biomedical technology Medicine Communications
Inertial sensing

7. Sensors Product Automotive Sensors Gyroscopes Humidity Sensors
Pressure Sensor Temperature Sensors Touch Sensors
UV Sensors Proximity Sensors

8. Automotive Sensors
Varies sensors are needed to help create a save functional car
Each component helps each other for the movement of the vehicle
Needlessly to say, these are just basic sensors for a car
More sensors developing such as visional sensors, touch screen, etc.

9. Humidity & Temperature Sensors
Provide accurate measurements of dew points and absolute humidity by combining humidity and temperature measurement
Works along side with temperature sensors to retrieve temperature measurements
Demanding applications include, automotive, aerospace, home appliances, etc.

10. Pressure Sensors Force collector types: Other types:
Piezoresistive strain gauge: Uses piezoresistive effect of bonded or formed strain gauges
Capacitive: Uses a diaphragm and pressure cavity to create a variable capacitor
Electromagnetic: Measures the displacement of diaphragms in terms of inductance
Optical: Uses of the physical changes of an optical fiber
Other types:
Thermals, Ionizations, Resonant, etc.

11. Touch Screen Sensors Clear glass panel with a touch responsive surface
Sensor has an electrical current or signal going through it and touching the screen can cause an voltage or signa change
Includes a touch screen panel, a controller and a software driver

12. Summary
There are lots of sensors are used by MEMS and continually growing as technology advances
MEMS sensors have steadily increase in growth through the 2000’s in applications in many industries and arenas such as medical, consumers, industrial and automotive.
MEMS sensors are improving technology annually
Microsensors converts measured mechanical signal into an electrical signal.

13. Reference
Automotive Sensors and Switches”. Sensata. Sensata Technologies. Web. 06 Apr < >
“ Bosch Semiconductors & Sensors”. MEMS Sensors. Bosch Invented for Life. Web. 06 Apr < semiconductors.de/en/automotive_electronics/mems/mems_.html>
“MEMS and Sensors”. STMicroelectronics. ST Life Augmented. Web. 30 Mar < sensors.html>
“Mircoelectromechanical Systems”. Wikipedia. Wikipedia Foundation. Web. 30 Mar <
“What is MEMS?”. MEMS & Sensors Industry Group. N.p., n.d. Web. 06 Apr <
“What is MEMS?”. MEMSnet. MEMS Cleanhouse. Web. 01 Apr <

14. Five Takeaways
Components on MEMS are: MicroStructures, MicroActuators, MicroSensors and MicroElectronics
Materials to MEMS Manufacturing: Silicon, Polymers, Metals and Ceramics
Bosch MEMS are used on daily appliances such as cars, phones, gaming industry and many mores.
Pyroelectric and piezoelectric properties enables sensors (Ceramic materials)
MEMS sensors are steadily increasing yearly in industries such as the medical field, industrial field, consumers field and automotive fields.