1. Along with shrinking from Macro-machine to MEMS :
Most of the knowledge already existing
But two things adapting mechanics to micro scale that are of great importance in MEMS
1) Electrostatic effect; ) Air damping control

2. Electrostatic Effect
Comb-drive
The work initiated by Bill Tang and Roger Howe should have been cited for many times.
But actually no people would like to do so.

3. Liquid Manipulation Using Electro-Wetting On Dielectric (EWOD)
by C-J Kim et al，UCLA

4. How does E and M couple each other in MEMS

5. Versatile Electrostatic effect
Electric feedback damping conditioning
Electrostatic Driving
Inertial
-ke / km = 
 ’ =  /(1+ )1/2
f0’ = f0 (1+ )1/2
Electric Tuning
km > 0, ke < 0
f0 = [(km- ke )/m]1/2 C
Electric
feedback

12. Positive utilization of Pull-in
17µm
DMD by TI
H Yang et al, IEEE SENSORS 2005

13. Avoiding in MEMS Sensor
失调 :
灵敏度 :
非线性:
MH Bao et al, Sens. Actuators, 2002

14. Improvement:
Push-pull balance and feedback loop

15. Comb-drive

17. Variable RF capacitors for large tuning range under low voltage
In electronic circuit, how we tune the frequency?
Variable RF capacitors for large tuning range under low voltage
IEDM 2007
IEEE E-D Lett. 2008
Electronic Lett. 2007

18. Tunable LC-tank resonator
Microelectronics J. 2007
Microwave Opt. Tech. Lett. 2008

19. In micro-machine, how can we do