1. MEMs Applications other than Sensors
EE 4611
Patrick Davich
4/13/16

2. Outline
What are MEMs?
How can they be used in other ways than sensors?

3. What are MEMs? MEMs are Micro-Electrical-Mechanical systems
Essentially bridge the gap between mechanical motions and electrical current, in either direction
Used commonly in microsensors, as stated by previous presentations

4. Other Applications Optical applications Non-Volatile Memory
Digital Micromirrors (projection)
Non-Volatile Memory
RF applications

5. Optical Applications
MEMs can be very small, on the magnitude of the wavelength of light
Because they use light to communicate, switches can be much smaller
A spider mite dwarfs a micromachined mirror assembly. Courtesy Sandia National Laboratories, SUMMiTTM Technologies, 

6. Projection and Digital Imaging
Portable Projectors require digital mirroring in order to create images
Two mirrors in the on and off position. A mirror in the on position directs light toward the projection optics. The mirrors are shown transparent to show device components. (Illustration courtesy of Texas Instruments.)

7. Non-Volatile Memory
Because they are mechanically driven, switches can latch and stay in that position when power is taken away
Works using a floating gate and a metal actuator

9. RF Applications Low-power filters/Variable capacitors Switches
Valuable due to the small size that it is capable of

10. RF Filters
Can adjust capacitors using vibrations, thus changing the LC constant in the filter

11. 5 Key Points
Main draw to MEMs in all of these applications is the ability to make it a very small size
It is also unique because it combines mechanical and electrical elements, much like a motor
Most common application is sensors, but can clearly be used elsewhere as well
They are valuable for outage situations
Can be used to tune RF devices

12. Sources http://www.memsnet.org/mems/what_is.html