1. CERN/EN/MME-MM/EDMS XXXXXXX
EN Division-Metallurgy and Metrology
Domaine / Field:
CLIC
Date:
XX/XX/2017
N° EDMS / EDMS Nr.:
XXXXXXX
Requérant / Customer:
XXXXXXXXXXXX
Liste de distribution / Distribution list:
XXXXXXXXXXXXXXX
FIB-STEM Observation Report of LES Cathode camera 2
Données expérimentales / Experimental data:
Sample: Description of the sample.
Equipment :
Optical Microscope Zeiss Axio-Imager, with ZenCore2 and Axio-Visio software.
Scanning Electron Microscope (SEM), field emission gun FEG Sigma (ZEISS) with InLens (Secondary Electron), Evan-Thornley Secondary Electron (SE2), and back-scattered electron (AsB) detectors for imaging.
Focus Ion Beam (FIB) XB540, Scanning Transmission Electron Microscopy.
Redaction / Written by:
E. RODRIGUEZ CASTRO – EN/MME-MM
Approuvé par / Accepted by:
F. LEAUX - EN/MME-MM
Expériences / Testing by:
Superviseur / Supervisor:
EN Division-Materials and Metrology
CERN/EN/MME-MM/EDMS XXXXXXX

2. Introduction:
The set of LES “camera 2” was analysis on EDMS n
Pulse length 5 us
5 us
Delay for pulse 600 ns
600 ns
Min voltage
1000 V
Max voltage
8500 V
Total number of pulses
5.5e7
Total number of breakdowns
4533
Automatic counting = 489
Manual counting = 504

3. Observation:
N. Pienimaki develop a Matlab script to divide surface in elements and 3 subsets:
Subset 1
0<1<2
Subset 2
1<2<3
Subset 3
And the rest

4. Observation: Subset 1 0<1<2 Subset 2 1<2<3 Subset 3
And the rest

5. Reference

6. Reference
Reference

7. 1 BD observation
1 BD observation

8. 1 BD observation
1 BD observation

9. 2 BD observation

10. 2 BD observation

11. Summary of observations
No dislocation structure visible.
Superficial layer affected on reference region (plastic deformation during machining?).
Disordered on 1 BD and 2 BD