1. (LAM Rocker Door Assembly Modify Proposal )
DRY-ETCH
(LAM Rocker Door Assembly Modify Proposal )

2. 1) Equipment & Valve Location
■ Equipment: LAM reserch
■ Process: Dry Etch
■ Valve Location: Multi Chamber Process Operation
( Between Transfer chamber (Bath Type) and Process Chamber )
Slit valve Location
Transfer
chamber
Process
Transfer Chamber
Process Chamber

3. 2) Existing Valve Problem
Cylinder
Change Impossible
Process
Chamber
Maintenance
No Space.
Transfer
Up/Down Cylinder-1 PM
Cylinder-2
Cylinder-3
Valve Fail
■ Chamber Vent
- In case of Valve Fail, due to release the docking
on Chamber, Vent is occurred.
(Back-up Lead time : around 8~9 hr.)
① Due to Chamber Back –up Time,
equipment yield is reduced.
② Due to release the Chamber docking,
Labor Cost is charged.
■ Valve Maintenance Impossible.
- Currently, under the docking condition, in case of valve fail,
maintenance is impossible without disassembling the Process Chamber.
(Bolt which is to disassemble Valve Actuator inside Cylinder is designed on the opposite side.

4. Chamber Vacuum Keep (Available)
3) New Version Modify Proposal
■ Modified Contents
Process
Chamber
Transfer
Chamber
Valve Fail
Flange
■ Chamber Vacuum Keep (Available)
- In case of Valve Fail, no need to release Chamber Docking
( No Chamber Vent )
① Chamber Back –up Time is reduced → Yield Increase
② Labor cost is down since there is no need to release
Chamber Docking.
Vacuum Side
Chamber Vacuum Keep (Available)
Cylinder Change
(Available)
Before Modify
After Modify
Block Ass’y
Up/Down Cylinder
PM용Cylinder
Process용Cylinder
■ Modify Contents
→ Valve Actuator body Modify
(New Parts & Modify)
→ Modify Cylinder
① Up / Down Cylinder
② P / M Cylinder
③ Process Cylinder

5. 3) New Version Modify Proposal
■ Maintenance Method
Before modify, Valve Maintenance Method
After modify, Valve Maintenance Method
FixedBlock
Bolt location
Disassembly Impossible
■ Bolt which is to disassemble Valve Actuator inside Cylinder is designed on the opposite side.
(Assembly & Disassembly is impossible)
■ Easy Assembly / Disassembly of Cylinder

6. (LAM Rocker Door Cylinder Proposal )
DRY-ETCH
(LAM Rocker Door Cylinder Proposal )

7. 1) Lam Equip. Slit valve Cylinder Problem
1. Body
Body
Fail Reason 1.
:Running Part’s Seal-ring is consisted with a thin O-ring so that it occurs air leak even though there is a little abrasion.
Due to the design of this valve, even it’s repaired,
it will have the same problem again soon.
2. Inside
Air in
Air in
Fail Reason 2.
:On disassembly, Shaft need to be twisted so that it will have scratch on it.
It leads to air leak(Repair Impossible)
Working(Good)
Working(Bad)

8. 2) Lam Equip. Slit valve Cylinder Modify Proposal
Modify Contents
1. Body
2. Busing
3. packing
4. Shaft
O-Ring Type
PNY U-Packing Type
5. Psd seal
6.Magnetic
7. Psd seal
O-Ring Type
Dual PDF-Seal Type
Extended Life Time
After Modify, Dual seal & U-Packing is applied
( Prevention on inside/outside Air Leak )

9. Compact社Cylinder Modified Model Lode lock Cylinder T/M Door Cylinder
Model :SL-A01
T/M Door Cylinder
Model :ST-A01
UP-DOWN Cylinder
Model :SM-M01

10. (LAM Rocker Door Assembly Procedure)
DRY-ETCH
(LAM Rocker Door Assembly Procedure)

11. New Version Description
◆ Parts Description
1) Main Block
1) Main Block
2) B Type Cylinder
3) A Type Cylinder Ass’y
4) C Type Cylinder Ass’y
2) Cylinder B
(UP/DOWN)
5) Cylinder Guide Block
3) Cylinder A
(T/M )
5) Cylinder Guide Block
4) Cylinder C
(P/M )

12. 2) B(UP/DOWN) Type Cylinder 3) A( T/M)Type Cylinder Ass’y
New Version Modify Contents
1) A Type Cylinder Ass’y
세부내용
■ Main Block
- Easy to Replace Cylinder
가공품제작
2) B(UP/DOWN) Type Cylinder
■ Modify Cylinder
- Life Time is improved.
3) A( T/M)Type Cylinder Ass’y + +
Cylinder Guide
A Type Cylinder
Cylinder Joint Block

13. 4) C(P/M ) Type Cylinder Ass’y
New Version Modify Contents
4) C(P/M ) Type Cylinder Ass’y
세부내용 + +
가공품제작
Cylinder Guide
C Type Cylinder
Cylinder Joint Block
5) Cylinder Guide Block
■ Cylinder Guide Block
- Easy to replace Cylinder