1. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Date of download: 10/14/2017
Copyright © ASME. All rights reserved.
From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
J. Tribol. 2009;131(3): doi: /
Figure Legend:
Cross sectional view of the gas-bearing supported MEMS-air turbine

2. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Date of download: 10/14/2017
Copyright © ASME. All rights reserved.
From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
J. Tribol. 2009;131(3): doi: /
Figure Legend:
Key structural features of the MEMS-air turbine

3. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Date of download: 10/14/2017
Copyright © ASME. All rights reserved.
From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
J. Tribol. 2009;131(3): doi: /
Figure Legend:
Exchange of neighboring rotors prior to the fusion bonding process results in devices with different journal bearing clearances

4. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Date of download: 10/14/2017
Copyright © ASME. All rights reserved.
From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
J. Tribol. 2009;131(3): doi: /
Figure Legend:
Journal bearing flow characteristics. The symbols correspond to experimental measurements in devices with target journal bearing clearance of 16 μm.

5. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Date of download: 10/14/2017
Copyright © ASME. All rights reserved.
From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
J. Tribol. 2009;131(3): doi: /
Figure Legend:
Measured top rotor speeds for different devices as a function of journal differential pressure ΔP

6. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Date of download: 10/14/2017
Copyright © ASME. All rights reserved.
From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
J. Tribol. 2009;131(3): doi: /
Figure Legend:
Comparison of experimental and analytical-CFD predictions of isotropic journal bearing stability boundary as a function of hydrostatic differential pressure ΔP

7. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Date of download: 10/14/2017
Copyright © ASME. All rights reserved.
From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
J. Tribol. 2009;131(3): doi: /
Figure Legend:
Comparison of typical operating protocols for previous and current-generation micro-air turbines. The top rotor speed for current-generation devices demonstrated at 1.7×106 rpm.

8. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Date of download: 10/14/2017
Copyright © ASME. All rights reserved.
From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
J. Tribol. 2009;131(3): doi: /
Figure Legend:
Whirl-ratio for different devices as a function of journal bearing damping ratio

9. From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
Date of download: 10/14/2017
Copyright © ASME. All rights reserved.
From: High-Speed Operation of a Gas-Bearing Supported MEMS-Air Turbine
J. Tribol. 2009;131(3): doi: /
Figure Legend:
SEM pictures of fillet at the root of a turbine blade