1. Toxic Materials in Device Manufacturing
A Brief look into the dangers of the manufacturing process, behind today’s technology
Nathan Insixiengmay
EE 4611

2. Outline The Widespread Reach The Problem The Effect on The Community
The Solution
Conclusion
References
Key Concepts

3. Widespread Reach
Gallium arsenide (GaAs) is a compound of the two elements, gallium and arsenic. It is a fundamental compound semiconductor material and forms the core substrate for semiconductor technology.
GPS
Fiber Optic and Wireless Networks
Mobile Phones
rohs.oeko.info/fileadmin/user_upload/Subst_Arsenic/Arsenic_Gallium_Arsenide_in_Se miconductors_ESIA.pdf

4. The Problem , All the Chemicals!
The process has a lot of dangerous Chemicals ( Arsenic, Sulfuric, and Hydrofluoric Acid.
Chemical Hazards in Semiconductors
T. Hawkinson and D. Korpela

5. The “Goods” Acetone Chemical-mechanical polishing of silicon wafers
Nose, throat, lung, and eye irritation, damage to the skin, confusion, unconsciousness, possible coma
Arsenic
Increases conductivity of semiconductor material
Nausea, vomiting, dyspepsia, decrease in erythrocyte and leukocyte production, abnormal heart rhythm, lung cancer
Cadmium
Creates “holes” in silicon lattice to create effect of positive charge
Damage to lungs, renal dysfunction, immediate hepatic injury, bone defects, hypertension

6. “Cancer Valley”, The Effects on the Community
IBM, Samsung, and many others!
Cancer, Birth Defects, and Heart issues in Workers AND Children
1970’s
nics_manufacturing_the_u_s_does_tragically_little.html
2000’s

7. How They Fixed it, The Solution?
sealed tools, negative air pressure, constant monitoring, automatic shutdown capability, and containment
Robots! via Automation
Exhaust management systems: wet scrubbers,
combustors, heated absorbers cartridges.
Strict Regulations - OSHA
Occupational Safety and Health Administration

8. Conclusion! Many Dangerous Components! Safe worker practice!
Regulations!
Exhaust management!
Automation!
Technology!

9. References
Home. (n.d.). Retrieved April 13, 2017, from
E. (Ed.). (n.d.). Arsenic and Gallium Arsenide are fundamental to Semiconductor (Microchip) Manufacturing . Retrieved April 13, 2017, from rohs.oeko.info/fileadmin/user_upload/Subst_Arsenic/Arsenic_Gallium_Arsenide_in_Se miconductors_ESIA.pdf
Semiconductor Safety Handbook. (n.d.). Retrieved April 13, 2017, from pXKkslkC&oi=fnd&pg=PA187&dq=poisonous%2Bdopants%2Bin%2Bsemiconductors &ots=OFRWJ46ykX&sig=PYIrrX64ZluwGXur0BVFApRCbS8#v=onepage&q=poisono us%20dopants%20in%20semiconductors&f=true

10. Key Concepts GaAs - Core Substrate for Doping, breaks down to Arsenic
Regulations and Exhaust Management to reduce environmental effects
Robots and Automation to Reduce worker Effects.
Semiconductor manufacturing creates highly reactive and/or toxic byproducts
Main process , until Substitute is found.