1. “1-Click” APC Validation Dashboard using JSL Adam Liegner
Samsung Austin Semiconductor
Fig. 2. One section of APC Tables. This validates feedback group sharing
Abstract
Method
Automatic Process Control (APC) is used to monitor and adjust thickness Samsung Austin Semiconductor.
APC is a combination of dozens of nested database tables connected to the tool’s process recipes and software controllers.
Significant documentation, validation, and matching activity required anytime there is a process change.
Currently, all manual verification: significant time spent preparing and analyzing tables, often with mistakes made due to volume of information; requires hours of time & thousands of clicks.
JMP JSL was used to create a “1-click” button to scrape through all tables, to perform a matching comparison, and to output easy-to-read dashboard summarizing APC status.
Clearly outlined and defined validation requirements for any process change.
Wrote SQL and data-file queries to access data tables.
Scripted JSL sections for each type of validation activity, based on user input.
Combined all sections into an easy to read, LEAN dashboard.
Conclusions
APC 1-click Dashboard saves thousands of clicks and hours of time for each validation activity
The JSL script and Dashboard can be easily adjusted to suit customer needs, like fleet-wide or intra-process comparisons
Serves as an excellent case study for increased data access by end users.
Objective
Results
Reduce ergonomic activity required to validate APC changes
Reduce time needed to perform APC validation
Reduce human error due to information overload
Fig. 1. Main Overview showing summary data, timestamps, and tabs for drilldown items.
Result 1
Result 2
Result 3
References
Daniel Sutton, SAS Innovations Engineer, JMP site leader
community.jmp.com discussion board