1. Tengfang (Tim) Xu, Ph.D., PE Lawrence Berkeley National Laboratory
Presentation to
ESTECH 2005
Tengfang (Tim) Xu, Ph.D., PE
Lawrence Berkeley National Laboratory

2. Investigating the Performance of a Minienvironment System
Tengfang (Tim) Xu, Ph.D., PE
Environmental Energy Technologies Division
Lawrence Berkeley National Laboratory
May 3, 2005 2 2

3. Investigating the Performance of a Minienvironment System
Introduction
Scope and Objectives
Case Study Methods
Results
Conclusions and Recommendations 2 2

4. Introduction Minienvironment
A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment
Separative Devices 2 2

5. Why Minienvironment? Minienvironment - Separative Devices
Gaining wide adoption in various industries
Knowledge about energy efficiency
Emerging technologies and strategies to improve efficiency 2 2

6. Cleanroom Electric Power
Cleanroom Measured Power

7. Cleanroom Contamination Control

8. Efficient Air Systems Reduce initial costs
optimized sizing
Reduce utility costs while benefiting productivity
Other non-energy benefits
Energy efficient design can be considered as a strategy in the industry to achieve cost savings and improve bottom line

9. ISO Standards from IEST
The Institute of Environmental Sciences and Technology (IEST)
ISO (1 through 8): Cleanrooms and Controlled Environments
ISO (1 through 3): Bio-contamination

10. Minienvironment within a Ballroom (Cleanroom)

11. Background
Energy information on minienvironments is essentially non-existent
Understand energy efficiency opportunities in minienvironments
Key metrics: W/cfm 2 2

12. Objectives
Develop an understanding of the key parameters contributing to energy performance of a minienvironment
Quantify energy performance of the minienvironment air system and identify opportunities for improving its energy performance. 2 2

13. Approaches Literature reviews
Develop a case study on minienvironment system performance
Collaborate with industry leaders and Sematech in research actions 2 2

14. Case Study Method Minienvironment Electric Power Airflow and Pressure
4 FFUs of 1’x2’
Dimensions (2’x4’x 7’7’’)
Electric Power
True RMS energy analyzer (±3%)
Airflow and Pressure
electronic micro-manometer (±3% of reading plus ±7 fpm)
Pitot tube (±2% of reading Pa)

15. Total fan power vs. Airflow rate
Case Study Results
Total fan power vs. Airflow rate

16. Power factor vs. Airflow rate
Case Study Results
Power factor vs. Airflow rate

17. Case Study Results
EPI vs. Airflow rate

18. Static pressure vs. Airflow rate
Case Study Results
Static pressure vs. Airflow rate

19. Pressure difference vs. airflow rate
Case Study Results
Pressure difference vs. airflow rate

20. Conclusions
Measure up with Cleanrooms: EPI

21. Recommendations - i
Improve energy performance of minienvironment systems
Fan-filter Unit
Airflow path 2 2

22. FFU: Wide Range of Efficiencies

23. FFU: Performance

24. Recommendations – ii
Understand energy implications of minienvironment vs. cleanroom through demonstrations
Electric power usage
Size of minienvironment
Cleanliness requirements 2 2

25. Recommendations - iii
Develop demonstration for approach and tools to tackle and implement energy efficiency throughout planning, construction, installation, design, commissioning, O&M, re-commissioning, reuse of minienvironment and integration with process and cleanroom facility 2 2

26. Recommendations - iv
Develop and identify strategies in energy efficiency for effective environmental control 2 2

27. Interaction with IEST
Interact with IEST to possibly adopt energy efficiency in recommended practice (RP) guidelines
IEST WGs 2 2

28. TTXU@LBL.GOV Lawrence Berkeley National Laboratory
Questions
Lawrence Berkeley National Laboratory 2 2