1. Microreactors: materials, fabrication, catalysis

2. Microreactor
Tiggelaar PhD thesis, Twente

3. Microreactors
Small volume good if expensive and/or dangerous chemicals
Fast reactions because small diffusion distances
Large surface area (either positive or negative effect)
Good temperature control and fast ramp rates
Good flow control because of laminar flow
Besser: J. Vac. Sci. Technol. B 21.2., Mar/Apr 2003

4. Silicon microreactors
Uniform temperature due to high thermal conductivity of silicon (also due to small dimensions of microstructures).
This is beneficial because it prevents hot spot creation, and enables highly exothermic and explosive reactions to be studied safely.

5. Microhotplate (1)
Sensors and Actuators B 68 Ž –233

6. Microhotplate (2)
Sensors and Actuators B 68 Ž –233

7. Linear microreactor
R.M. Tiggelaar et al. / Sensors and Actuators A 119 (2005) 196–205

8. A comprehensive article
P Knapkiewicz: The silicon–glass microreactor with embedded sensors—technology and results of preliminary qualitative tests, toward intelligent microreaction plant, J. Micromech. Microeng. 23 (2013) (10pp) doi: / /23/3/035014

9. Overview
J. Micromech. Microeng. 23 (2013)

10. J. Micromech. Microeng. 23 (2013) 035014

11. Continuos fluid + droplets
J. Micromech. Microeng. 23 (2013)

12. J. Micromech. Microeng. 23 (2013) 035014

13. J. Micromech. Microeng. 23 (2013) 035014

14. High pressure reactor
Tiggelaar

15. A single reaction spot
J.Micromech.Microeng. 2011

16. Droplet movement

17. Digital microreactor

18. Multiphase flow
Javier Atencia & David J. Beebe

19. Droplet reactors
Cells or microbeads are separated from each other by oil plugs.
In theory, thousands of droplets/minute = thousands of replicates of your experiment
Javier Atencia & David J. Beebe

20. Thermal isolation
Silicon is good because high thermal conductivity ensures uniform temperature
Silicon is bad because heat spreads efficiently and local heating is impossible
Black area = silicon wafer
White = etched area

21. Heated nebulizer chip (1)
Nebulizer gas enters from a thru-wafer via-hole
P. Östman, Lab. Chip., 2006, p948
P. Östman, Anal.Chem. 2006, p. 3027
S. Franssila, J.MEMS 2006, p. 1251

22. Heated nebulizer chip (2)
Saarela et al, 2007

23. Glass microprocessing
Ville Saarela et al., µTAS 2006, Tokio

24. Thermal isolation, LC

25. Gradient generator
Langmuir 2000, 16,

26. Lamination mixing

27. Radiolabeling synthesis
Quake et al: Radiolabeled Imaging Probe Using Integrated Microfluidics

28. Radioactive labeling reactor
Quake et al: Radiolabeled Imaging Probe Using Integrated Microfluidics

29. Buried channels (1)
Top: mask layout (1–3) sealable channels; (4) gradually varying depth design; (5) unsealable mask window for access holes or nano-scale holes in the oxide layer; (6) non-uniform channel.
J. Micromech. Microeng. 20 (2010) (8pp) doi: / /20/4/045013

30. Buried channels (2)

31. Fluidic connectors
Fluidic connectors
Ville Saarela, TKK

32. Reactor packaging
J. Micromech. Microeng. 23 (2013)

33. The complete system
J. Micromech. Microeng. 23 (2013)

34. On-the-spot 4 topics, 4 groups of ca. 4 people
25 min to study the article
4*5 min short talks to explain key features:
-materials/surfaces & compatibility
-fluid flow: pumping and valving
-thermal characteristics
-sensors-detectors

35. 1. TiO2 photocatalytic
J. Micromech. Microeng. 25 (2015)

37. 2. Nanoparticle synthesis
small 2014, 10, No. 6, 1076–1080

38. small 2014, 10, No. 6, 1076–1080

39. 3. Catalytic microreactor
Chemical Engineering Journal 135S (2008) S317–S326

41. 4. PDMS-glass synthetic reactor
Lab Chip, 2002, 2, 197–202

42. Lab Chip, 2002, 2, 197–202