1. Microelectronic Fabrication
Lecture IV
Thermal Processes
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

2. Microelectronic Fabrication
Thermal Processes in IC Fabrication `
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

3. Microelectronic Fabrication
Thermal Processes: Definition
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

4. Microelectronic Fabrication
Thermal Processes
OXIDATION
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

5. Microelectronic Fabrication
Oxidation: Introduction
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

6. Microelectronic Fabrication
Oxidation: Introduction
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

7. Microelectronic Fabrication
Oxidation: Application
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

8. Microelectronic Fabrication
Oxidation: Application – Diffusion Barrier
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

9. Microelectronic Fabrication
Oxidation: Application – Passivation Surface
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

10. Microelectronic Fabrication
Oxidation: Application – Screen Oxide
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

11. Microelectronic Fabrication
Oxidation: Application – Pad & Barrier Oxides in STI Process
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

12. Microelectronic Fabrication
Oxidation: Application – Pad Oxide
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

13. Microelectronic Fabrication
Oxidation: Application – Device Isolation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

14. Microelectronic Fabrication
Oxidation: Application – Blanket Field Oxide Isolation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

15. Microelectronic Fabrication
Oxidation: Application – LOCOS
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

16. Microelectronic Fabrication
Oxidation: Application – LOCOS Process
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

17. Microelectronic Fabrication
Oxidation: Application – Sacrificial Oxide
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

18. Microelectronic Fabrication
Oxidation: Application – Device Dielectric
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

19. Microelectronic Fabrication
Oxidation: Application – Device Dielectric
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

20. Microelectronic Fabrication
Oxidation: Mechanisms
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

21. Microelectronic Fabrication
Oxidation: Mechanisms
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

22. Microelectronic Fabrication
Oxidation: Oxide Growth Rate Regime
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

23. Microelectronic Fabrication
Oxidation: < > Silicon Dry Oxidation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

24. Microelectronic Fabrication
Oxidation: Wet (Steam) Oxidation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

25. Microelectronic Fabrication
Oxidation: < > Silicon Wet Oxidation Rate
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

26. Microelectronic Fabrication
Oxidation Rate
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

27. Microelectronic Fabrication
Oxidation Rate: Temperature
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

28. Microelectronic Fabrication
Oxidation Rate: Wafer Orientation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

29. Microelectronic Fabrication
Oxidation Rate: Wet Oxidation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

30. Microelectronic Fabrication
Oxidation Rate: Dopant Concentration
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

31. Microelectronic Fabrication
Oxidation Rate: Differential Oxidation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

32. Microelectronic Fabrication
Oxidation Process
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

33. Microelectronic Fabrication
Dry Oxidation System
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

34. Microelectronic Fabrication
Dry Oxidation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

35. Microelectronic Fabrication
Gate Oxidation Steps I
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

36. Microelectronic Fabrication
Gate Oxidation Steps II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

37. Microelectronic Fabrication
Wet Oxidation Process
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

38. Microelectronic Fabrication
Wet Oxidation Process Steps I
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

39. Microelectronic Fabrication
Wet Oxidation Process Steps II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

40. Microelectronic Fabrication
Rapid Thermal Oxidation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

41. Microelectronic Fabrication
Oxide Measurement
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

42. Microelectronic Fabrication
Oxidation: Summary
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

43. Microelectronic Fabrication
Thermal Processes
DIFFUSION
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

44. Microelectronic Fabrication
Diffusion: Introduction
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

45. Microelectronic Fabrication
Diffusion Doping: Illustration
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

46. Microelectronic Fabrication
Diffusion Doping: Illustration
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

47. Microelectronic Fabrication
Diffusion Doping: Illustration
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

48. Microelectronic Fabrication
Diffusion Doping Process I
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

49. Microelectronic Fabrication
Diffusion Doping Process II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

50. Microelectronic Fabrication
Diffusion Doping Process II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

51. Microelectronic Fabrication
Diffusion Doping Process Steps I
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

52. Microelectronic Fabrication
Diffusion Doping Process Steps II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

53. Microelectronic Fabrication
Diffusion Doping Process Steps III
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

54. Microelectronic Fabrication
Diffusion Doping Process Steps IV
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

55. Microelectronic Fabrication
Diffusion Doping Process Steps V
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

56. Microelectronic Fabrication
Diffusion Doping Process Steps VI
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

57. Microelectronic Fabrication
Dopant Oxide Deposition
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

58. Microelectronic Fabrication
Cap Oxidation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

59. Microelectronic Fabrication
Drive-In
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

60. Microelectronic Fabrication
Drive-In
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

61. Microelectronic Fabrication
Strip Oxide
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

62. Microelectronic Fabrication
Diffusion: Limitations & Applications
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

63. Microelectronic Fabrication
Diffusion: Applications – Drive In
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

64. Microelectronic Fabrication
Diffusion: Applications – Well Implantation & Drive In
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

65. Microelectronic Fabrication
Diffusion: Applications – Boron USJ Formation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

66. Microelectronic Fabrication
Diffusion: Applications – Boron USJ Formation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

67. Microelectronic Fabrication
Thermal Processes
ANNEALING
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

68. Microelectronic Fabrication
Post- Implantation Annealing I
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

69. Microelectronic Fabrication
Post- Implantation Annealing II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

70. Microelectronic Fabrication
Before Ion Implantation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

71. Microelectronic Fabrication
After Ion Implantation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

72. Microelectronic Fabrication
After Ion Implantation
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

73. Microelectronic Fabrication
Thermal Annealing I
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

74. Microelectronic Fabrication
Thermal Annealing II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

75. Microelectronic Fabrication
Thermal Annealing II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

76. Microelectronic Fabrication
Annealing: Summary I
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

77. Microelectronic Fabrication
Annealing: Summary II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

78. Microelectronic Fabrication
Annealing: Summary III
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

79. Microelectronic Fabrication
Thermal Processes
RTP
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

80. Microelectronic Fabrication
Rapid Thermal Processes: Introduction
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

81. Microelectronic Fabrication
Rapid Thermal Processes: Introduction
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

82. Microelectronic Fabrication
RTP Chamber
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

83. Microelectronic Fabrication
Annealing & Dopant Diffusion I
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

84. Microelectronic Fabrication
Annealing & Dopant Diffusion II
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

85. Microelectronic Fabrication
Anneal Rate vs. Diffusion Rate
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

86. Microelectronic Fabrication
Dopant Diffusion After Anneal
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

87. Microelectronic Fabrication
Advantages of RTP over Furnace
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006

88. Microelectronic Fabrication
RTP: Summary
KUKUM – SHRDC INSEP Training Program 2006

89. Microelectronic Fabrication
Thermal Processes: Summary
School of Microelectronic Engineering
KUKUM – SHRDC INSEP Training Program 2006