1. THE PREPARATION OF AlN DOPED ON ZnO TACTILE SENSOR
Date : 2017/05/28
THE PREPARATION OF AlN DOPED ON ZnO TACTILE SENSOR
Reporter :Yu-Jie Shen

2. Outline 1 2 3 4 5 Introduction Purpose Experimental Method
Results and Discussions
Conclusion 1 2 3 4 5

3. Figure 1. The schematic of Da Vinci surgical system[2].
Introduction
The world of biosensors is expanding at a rapid pace with an ever increasing demand for more sensitive miniaturized devices[1].
In addition, the tactile sensor can be applied on the minimal invasive surgery.
Figure 1. The schematic of Da Vinci surgical system[2].

4. Purpose
To fabricate the force-feedback sensor based on the piezoelectric thin film.
To measure and define the relationship between the feedback electric current of bio-tissue.
In this study we will improve the accuracy and efficiency of surgery under the tactile tools.
在這項研究中，我們將提高下觸覺感測的準確性和手術的效率。

5. Piezoelectric Principle
Piezoelectric effect is the ability of certain materials to generate an electric charge in response to applied mechanical stress[3].
Figure 2. Voltage applied to piezoelectric mater causes it to change shape[4]. 

6. Zinc Acetate Dihydrate
Solution parameters
Name
Chemical formula
Purity
Viscosity PH
Zinc Acetate Dihydrate
Zn(CH3COO)2∙2H2O
98%
6-7
Aluminum Nitride
AlN
99.5%,
65-75 nm, Hexagonal
Ethylene Glycol
C2H6O2
99%
21CPS
6-7.5
Ethanol
C2H5OH
99.4%
1.2CPS 7
Triethanolamine
C6H15NO3
10.5
Table 1. The parameters of AlN Doped ZnO solution.

7. High temperature furnace
Process parameters
Temperature
Time
Spin coating
Room temperature
600 RPM
800 RPM
1000 RPM
Heating
150 ℃
25 Mins
High temperature furnace
200 ℃
250 ℃
1 Hour
Table 2. The parameters of AlN Doped ZnO process.

8. Flow chart of fabrication
Ethanol
Glycol
Zinc acetate
Triethanolamine
Stirring was continued for three hours holding the temperature 80 ℃
Aluminum Nitride
Deposition of 24hr
Atmospheric plasma
Spain coating
At 150˚C for 25min three time
High temperature furnace
In the next sildes will explain the process in detail
X-ray Diffraction (XRD)
Scanning Electron Microscopy (SEM)
Oscilloscope test piezoelectric film

9. Powder preparation
Rigorous stirring
Deposition of 24hr
Atmospheric plasma
High
temperature furnace
Baking
Spin coating

10. Measurement

11. Results & Discussion(1/6)
(a)
(b)
(c)
Figure 3. The SEM photograph of AlN doped ZnO thin film, spin coating speed (a) 600 RPM (b) 800 RPM (c) 1000 RPM (annealing temperature:200°C)

12. Results & Discussion(2/6)
(a)
(b)
(c)
Figure 4. The SEM photograph of AlN doped ZnO thin film, spin coating speed (a) 600 RPM (b) 800 RPM (c) 1000 RPM (annealing temperature:250°C)

13. Results & Discussion(3/6)
(a)
(b)
signal
Figure 5. The XRD of AlN doped ZnO thin film with different spin coating speed (a)annealing temperature at 200℃ ; (b) annealing temperature at 250℃.

14. Results & Discussion(4/6)
Figure 6. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (600 RPM).

15. Results & Discussion(5/6)
Figure 7. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (800 RPM).

16. Results & Discussion(6/6)
Figure 8. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (1000 RPM).

17. Conclusion
In this study, the fabrication of the force-feedback sensor based on the piezoelectric thin film is developed.
The relationship between the output voltage and applied force is presented.
The best force-feedback response is 1000 RPM on the copper.

18. References
[1] [2] Paul J. Johnson, MS, David E. Schmidt, PhD, and Umamaheswar Duvvuri, MD, PhD“Output control of da Vinci surgical system’s surgical graspers”, Science Direct, Vol. 186, pp.56-62, [3] Yingbin Bian, Moning Liua, Genshui Ke, Yigang Chen, Jim DiBattista, Eason Chan, Yimou Yang“Aluminum nitride thin film growth and applications for heat dissipation” Surface & Coatings Technology, Vol pp , [4] David T.W. Lin, You-Peng Yuan, Yuh Chung Hu“Fabrication of ZnO Thin Film Sensor for CO2 Monitoring.” IEEA Environment, Energy and Applications, 2015.

19. Thank you for your attention
That’s all my presentation, thank you for your attention.