1. SEMINAR 1. Title: Thin Film Process Technology for AMOLED Display
2. Speaker: Prof. Heeyeop Chae
3. Time: :00pm
4. Place :: e+ Lecture Hall (room 83188), 2nd Research Building,
Sungkyunkwan University (SKKU)
5. Summary :
Various thin film process technologies for AMOLED display will be discussed in this lecture. The following thin film deposition and patterning technologies will be discussed in this lecture.
- Plasma enhanced chemical vapor deposition (PECVD) process
- Crystallization process
- Ion implantation process
- Metal thin film deposition process
- Photolithography process
- Plasma etching process
- Atomic layer deposition process
6 Background :
Education
M.I.T. , Ph.D. in chemical engineering
Seoul National University, M. Eng. in chemical engineering
Seoul National University, B. S. in chemical engineering
Work
– Current , Sungkyunkwan University (SKKU),
School of Chemical Engineering, Professor
– Applied Materials, Inc., Senior Process Engineer
– KIST, Commissioned Researcher