1. SEMI Standards for Equipment Automation

2. Solution: SEMI Equipment Communication Standards (SECS)
6/17/2018
Solution: SEMI Equipment Communication Standards (SECS)
What are the SEMI Equipment Communication Standards??
International Industry standards covering everything from wafers, to equipment hardware, to cleanroom metrics, to safety standards, and equipment automation standards
Equipment Automation Software Standards
SECS-I - Message Transport, RS-232 (E4) – not used for 300mm
SECS-II - Message Content (E5)
HSMS - High-Speed Message Services (E37)
HSMS-SS - High-Speed Message Services, Single-Session E37.1
TCP/IP based protocol designed to replace SECS-I
GEM - Generic Equipment Model (E30)
Object Services (E39)
Process Job Management (E40)
Carrier Management (E87)
Substrate Tracking (E90)
Control Job Management (E94)
Equipment Performance Tracking (E116)
300mm
Standards
Cimetrix Confidential 7

3. SEMI Equipment Communication Standards (SECS)
Equipment Automation Application
GEM ( E 30 )
SECS - II ( E 5 )
HSMS ( E 37 )
Factory Host

4. Solution: SEMI Equipment Communication Standards (SECS)
6/17/2018
Solution: SEMI Equipment Communication Standards (SECS)
Why use SECS??
Increase Supplier Profitability
Reduces development costs and Increases reliability
Allows focus on unique value-added features
Helps Ensure product acceptance
Increase End-User (IC Maker) Satisfaction
Reduces factory integration costs and production ramp time
Lowers manufacturing costs
Clarifies expectations for suppliers
Meets Manufacturing Business Requirements
Provides Capabilities in Each Target Area
Availability of cost effective, Real-world-proven commercial solutions
Minimize time-to-market & cost of integration
Meets Technology Requirements
Platform independent
Industry standard, non-proprietary, open, extendable architecture
Proven for Mission critical applications
Cimetrix Confidential 9

5. SEMI Equipment Communication Standards (SECS) - Timeline
6/17/2018
SEMI Equipment Communication Standards (SECS) - Timeline
1978
1980
1982
1984
1986
1988
1990
1992
1994
1996
1998
1999
2000
2001
2002
2003
2004
SECS-I
SECS-II
GEM (E30)
HSMS (E37)
300MM
Object Services (E39)
Process Job (E40)
Carrier Management (E87)
Substrate Tracking (E90)
Control Job (E94)
Equipment Performance Tracking (E116)
Cimetrix Confidential 8

6. SEMI Standards Committees
Relevant Equipment Automation Software Standards are managed by the North America Information and Control Committee (NA I&CC)
Cimetrix Participates on various NA I&CC Task Forces
The 300mm standards are being managed primarily by the GEM 300 TF
The Interface A standards are being managed primarily by the DDA TF

7. Reading SEMI Standards
Skip E4 – most work we will do uses HSMS (E37) which we will review in this training
E5 (SECS-II messages) is a “dictionary” of data items and messages to be used as a reference only.
GEM (E30) – This is a good place to start. Describes fundamental capabilities and is relatively “readable”.
(sematech documents)
300mm Standards Reading Order
Control Job (E94) and Process Job (E40)
Carrier Management (E87)
Substrate Tracking (E90)
Equipment Performance Tracking (E116)
Cimetrix Sequence Diagrams
CIM300 Expert Related Work (as needed)
AMHS Parallel I/O interface (E84)
Carrier ID Reader (E99)
User Interface Guidelines (E95)
SEMI Documents are typically published with a suffix noting the revision (e.g E = March 2004 revision)

8. The SECS-I Protocol Point-to-Point Asynchronous RS232 connection Host
6/17/2018
The SECS-I Protocol
Point-to-Point Asynchronous RS232 connection
Host
SECS-I
Equipment
Cimetrix Confidential

9. The SECS-I Protocol 254-byte blocks, Multi-block messages
6/17/2018
The SECS-I Protocol
254-byte blocks, Multi-block messages
10-byte header (Preceded by Length)
10-byte
Header Data (0-244 Bytes)
Block #1
Block #2
Block #3
Message Data R W E
Block Length
Device ID
Block #
System Bytes
Stream
Function
Cimetrix Confidential

10. The SECS-I Protocol The SECS-I Block Protocol SECS-I Transaction
6/17/2018
The SECS-I Protocol
The SECS-I Block Protocol
SECS-I Transaction
Sender Receiver
ENQ
SECS Block
EOT
ACK
Sender Receiver
Primary Message
Reply Message
Cimetrix Confidential

11. The SECS-I Protocol SECS-I Protocol Timeouts
6/17/2018
The SECS-I Protocol
SECS-I Protocol Timeouts
T1 - Inter character Timeout Limits the time between receipt of characters within a block.
T2 - Block Protocol Timeout Limits the time between sending ENQ and receiving EOT, sending EOT and receiving the length byte, and sending the second checksum byte and receiving any character
T3 - Reply Timeout Is a limit on the length of time to wait after a primary message has been sent and before the arrival of the reply.
T4 - Inter-block Timeout The time interval between the successful receipt of a block in a multiblock message.
Cimetrix Confidential

12. The SECS-I Protocol SECS-I Protocol Timeouts (cont.)
6/17/2018
The SECS-I Protocol
SECS-I Protocol Timeouts (cont.)
Set up SECS-I parameters at Equipment for compatibility with Host.
Set Baud Rate and Device ID according to Host requirements
The SECS timeout settings on the Equipment need to be large enough to allow for inefficient Host software. Assume worst-case scenarios.
T1 = 5.0 seconds T2 = 10.0 seconds T3 = 90 seconds
T4 = 60 seconds Retry = 5
Timeout settings on the Host should be compatible with Equipment requirements.
Operator should be able to configure settings
Cimetrix Confidential

13. SEMI Communication Standards E37 and E37.1
6/17/2018
The HSMS Protocol
SEMI Communication Standards
E37 and E37.1
Cimetrix Confidential

14. HSMS Protocol High-Speed Message Task Force Objectives Methods
6/17/2018
HSMS Protocol
High-Speed Message Task Force
Objectives
Faster than RS-232
Independent Implementations are Interoperable
Maximum Commodity Content (Easy to Build)
Wide Platform Choice
Propose a Solution Quickly
Methods
Use TCP/IP (Widely Available)
Use TCP/IP Sockets Application Interface
Replace SECS-I (E4) with HSMS
SECS-II, GEM, and 300mm standards remain unchanged
Cimetrix Confidential

15. 6/17/2018
HSMS Protocol
HSMS Standards
Cimetrix Confidential

16. The HSMS-SS Protocol Point-to-Point TCP/IP based protocol Host
6/17/2018
The HSMS-SS Protocol
Point-to-Point TCP/IP based protocol
Host
HSMS
Equipment
Cimetrix Confidential

17. 6/17/2018
HSMS Protocol
HSMS is a newer network protocol designed to be a direct replacement for the legacy SECS-I serial protocol
Cimetrix Confidential

18. HSMS Protocol HSMS-SS Protocol Control Messages 6/17/2018
Cimetrix Confidential

19. 6/17/2018
HSMS Protocol
HSMS-SS State Model
Cimetrix Confidential

20. 6/17/2018
Cimetrix Confidential

21. SEMI Communication Standard E5 “What to Send”
The SECS-II Protocol
SEMI Communication Standard E5
“What to Send”

22. SECS-II Message Definitions
6/17/2018
SECS-II Message Definitions
The SECS-II standard defines the data formats and usage of hundreds of standard messages, and allows for user-defined messages
A SECS-II message definition is “self-descriptive” defining the number, length, and of the message items.
Cimetrix Confidential

23. Format Code is Data Item Type + Number of Length Bytes
The SECS-II Protocol
SECS-II Data Items
Message Data
Checksum
Data Item # Data Item # Data Item # Data Item #4
Format Length Data
Code Bytes
Format Code is Data Item Type + Number of Length Bytes

24. Number of Length Bytes = 1
The SECS-II Protocol
Number of Length Bytes = 1
SECS-II Data Item Formats
Format Standard (Octal) Hex SML
List L
Binary B
Boolean (T/F) BOOLEAN
ASCII A
JIS J
8-byte Signed Integer I8
1-byte Signed Integer I1
2-byte Signed Integer I2
4-byte Signed Integer I4
8-byte Floating Point F8
4-byte Floating Point F4
8-byte Unsigned Integer 50 A1 U8
1-byte Unsigned Integer 51 A5 U1
2-byte Unsigned Integer 52 A9 U2
4-byte Unsigned Integer 54 B1 U4

25. The SECS-II Protocol SECS-II Stream and Function Notation
Stream Number - Message Category (Topic)
Streams 0-18 Currently Defined in the Standard
Streams Reserved for Standard Messages
Streams Reserved for User Defined Messages
Function Number - Specific Message
Functions 0-64 Reserved for Standard Messages
Functions Reserved for User Defined Messages

26. The SECS-II Protocol SECS-II Messages Examples:
Stream 5 - Alarm Management
Stream 5, Function 1 = Alarm Report (E->H)
Stream 5, Function 2 = Alarm Report Acknowledge (E<-H)
Stream 7 - Process Program Management
Stream 7, Function 3 = Process Program Send (E<->H)
Stream 7, Function 4 = Process Program Send Acknowledge (E<->H)
Stream 7, Function 5 = Process Program Request (E<->H)
Stream 7, Function 6 = Process Program Data (E<->H)

27. Reading SEMI Standards – SECS Messages
6/17/2018
Reading SEMI Standards – SECS Messages
S1, F16 Off-line Acknowledge
<OFLACK>
S2, F18 Date and Time Data
<TIME>
S1, F13 Establish Communications Request
L, 2
<MDLN>
<SOFTREV>
S6, F11 Event Report Send
L,3
<DATAID>
<CEID>
L,n
<RPTID>
L, m
<V1>
...
Cimetrix Confidential

28. The Generic Equipment Model (GEM)
SEMI Communication Standard E30
“Specific Set of What to Send
and Specific Capabilities to Support”

29. The Generic Equipment Model (GEM)
Requirements for implementing SECS interfaces on Equipment
Specifies a set of required messages and capabilities
Specifies other implementation requirements such as data item formats, text lengths, trace counts, number of limits, etc.
Specifies operator front panel requirements
Specifies required equipment state models
GEM Compliance Statement

30. The Generic Equipment Model (GEM)
Why?
To reduce cost of integration into factory automation systems
Improve quality of Equipment SECS Interface
$500K
Source: Intel, 1988
$250K
Without GEM
$50K with GEM
1988
1994
50% of Problems
Related to Embedded
Equipment Software
Source: IBM, 1992

31. The Generic Equipment Model (GEM)
GEM Equipment Capabilities
Process State Model
Establish Communications
Data Collection
Alarm Management
Remote Control
Equipment Constants
Process Program (Recipe) Management
Material Movement
Equipment Terminal Services
Error Messages
Clock
Spooling

32. E30 - Generic Equipment Model (GEM)

33. GEM Equipment Capabilities

34. State Models Required GEM State Models
Process State Model (Equipment Specific)
Communication State Model
Alarm State Model
Control State Model
Material Movement State Model (Equipment Specific)
Spooling State Model

35. State Models Harel Notation David Harel (Author)
“Statecharts: A Visual Formalism for Complex Systems”
Science of Computer Programming, 1987, Elsevier Science Publishers

36. State Models
Equipment Process State Model

37. Establish Communications
Requirements
Communication State Model
Operator Communication State display
Operator Enable/Disable commands
Power-Up State (Enabled/Disabled)
Establish Communications Timer Equipment Constant

38. Establish Communications
Communication State Model
An Equipment Constant (EC) determines
whether the application starts up in the
DISABLED or ENABLED / NOT
COMMUNICATING state.

39. Establish Communications
Establish Communication Scenarios
Either the Equipment or Host can send the S1F13 Connect Request Message to Establish Communications
H E
Connect Request S1F13
Acknowledge S1F14
The Equipment will periodically send the S1F1 “Heartbeat” message to check the Host link.
Are You There S1F1
Online Data S1F2

40. Data Collection Requirements Collection Events
Host Defined Event Reports
Host Enable/Disable of Report Send
Maintain Disk File for Report Definitions and Enable Status
Status Data Collection
Variable Data Collection
Trace Data Collection
Variable name list request
Host Limits Monitoring
On-line Identification

41. Data Collection Event Report Definition Scenario
Host Defines Event Report H E
Event Report Definition S2F33
Acknowledge S2F34
Host Links Reports to Events H E
Link Report to Event S2F35
Acknowledge S2F36
Host Enables Event Reporting H E
Enable Event S2F37
Acknowledge S2F38

42. Data Collection Event Report Scenario
Equipment Data can be uploaded to the Host automatically in an Event Report Message.
H E
Multi-block Inquire S6F5
Multi-block Grant S6F6
Event Report S6F11
Report Acknowledge S6F12
SECS-II Requires the Equipment to use this
Multi-Block Inquire/Grant transaction before
sending a large Event Reports.

43. Data Collection Event Report Request Scenarios
Host Requests Event Report Data by CEID
H E
Event Report Request S6F15
Report Data S6F16
Host Requests Event Report Data by RPTID
Event Report Request S6F19
Report Data S6F20

44. Data Collection Host Status Variable Request Scenarios
Host Requests Status Variable Values
H E
Status Data Request S1F3
Status Variable Values S1F4
Host Requests Status Variable Namelist
Namelist Request S1F11
Status Variable Names S1F12

45. Data Collection Host Status Variable Request Scenarios (cont.)
Host Requests Online Data
H E
“Are You There” S1F1
Online Data S1F2

46. Data Collection Time Driven Trace Scenarios Host Defines Trace Data
H E
Trace Definition S2F23
Acknowledge S2F24
Equipment Reports Trace Data
Trace Data S6F1
Acknowledge S6F2

47. Alarm Management Requirements
Set of Alarms for operator, equipment, and material safety
Enabled/Disabled states on must be saved on disk
Host Alarm Data Request
Alarms must have SET and CLEAR states
Note Collection Event when each alarm is SET and CLEAR

48. Alarm Management Alarm States
The Equipment should signal a Collection Event for each Alarm State Transition.
Thus, the Equipment will send an S5F1 (Alarm Report) and S6F11 (Event Report)
for each state transition, totalling 4 messages for each alarm. However, to reduce
message traffic, the Host can disable either the reporting of the alarm, or the
reporting of the event, or both
ALARM
SET (ON)
CLEAR (OFF)

49. Alarm Management Alarm Reporting Scenarios
The Equipment reports alarms to the Host as they occur H E
Alarm Report S5F1
Report Acknowledge S5F2
Event Report S6F11
Report Acknowledge S6F12
The Host can enable or disable the reporting of an alarm.
H E
Alarm Enable/Disable S5F3
Acknowledge S5F4

50. Alarm Management Alarm Data Request Scenarios
The Host can request the list of alarms on the equipment.
H E
Alarm Data Request S5F5
Alarm Data S5F6
The Host can request the list of set alarms.
Alarm Data Request S5F7
Alarm Data S5F8

51. Remote Control Requirements Control State Model
Status Variables, and Events
Minimum START and STOP Remote Commands
Control State Display and Operator Commands
Appropriately accept/deny Operator and Host commands in ONLINE sub-states

52. Remote Control Control State Model Three Equipment Constants
determine the equipment’s
power-up Control State.
The operator display
should indicate the
current Control State.

53. Remote Control Host Online/Offline Scenarios
Host Sets the Equipment Offline
H E
Offline Command S1F15
Acknowledge S1F16
Host Sets the Equipment Online
Online Command S1F17

54. Remote Control Remote Command Scenario
The S2F41 Message (Remote Command with Parameters)
H E
Remote Command S2F41
Command Acknowledge S2F42

55. Equipment Constants Requirements Non-volatile storage
Validation and Verification for EC change
Host EC Namelist request message
Host Sets New Equipment Constant Message
Host Requests Equipment Constant Values
Maintains Disk File for Equipment Constants
Provide for Operator changing of Equipment Constants
Provide Operator EC Change Event and variable indicating VID of the changed EC

56. Equipment Constants Host EC Management Scenarios
Request Equipment Constant Values H E
EC Request S2F13
EC Value S2F14
Request Equipment Constant Namelist H E
EC Namelist Request S2F29
EC Namelist S2F30
Set Equipment Constant Value H E
New EC Values S2F15
Acknowledge S2F16

57. Process Program (Recipe) Management
Requirements
Equipment must provide a Process Program Editor
CEID for Process Program change, create, or delete
Non-volatile disk storage of Process Program Library
Host initiated upload, download, delete, and directory request
Equipment (Operator) initiated upload and download
Support either Formatted or Unformatted Process Program Messages or both
Process Program Verification

58. Process Program Management
Equipment (Operator) Initiated Scenarios
Process Program Upload:
H E
Multi-block Inquire S7F1
Multi-block Grant S7F2
Process Program Data S7F3
Acknowledge S7F4
Process Program Download:
PP Request S7F5
Process Program Data S7F6
SECS-II Requires the Equipment to use this Multi-
Block Inquire/Grant transaction before sending a
large S7F3 (Process Program Send) message.

59. Process Program Management
6/17/2018
Process Program Management
Host Initiated Process Program Scenarios
Process Program Upload:
H E
PP Request S7F5
Process Program Data S7F6
Process Program Download
Multi-block Inquire S7F1
Multi-block Grant S7F2
Process Program Data S7F3
Acknowledge S7F4
Cimetrix Confidential

60. Process Program Management
Host Initiated Process Program Scenarios
Host Deletes Process Program H E
Delete S7F17
Acknowledge S7F18
Host Requests Process Program Directory
H E
Directory Request S7F19
Process Program Directory S7F20

61. Material Movement Requirements
Provide variables and events indicating when material is sent or received at a port (Port State Model)
Define variables and events required to relate status of material and material ports
Provide a Material ID (Lot ID) - ASCII 16-bytes

62. Equipment Terminal Services
Requirements
Provide display capability of at least 160 characters
CEID for Operator acknowledgment of Host message
Provide means for text entry for Operator
New messages should overwrite existing message
0-length message should clear display

63. Equipment Terminal Services
Terminal Services Scenarios
Operator sends text message to the Host H E
Text Message S10F1
Acknowledge S10F2
Host sends text to be displayed for the Operator on the Equipment’s Front Panel
H E
Text Message S10F3
Acknowledge S10F4

64. Error Messages Requirements Detect communication link errors (SECS-I)
Detect SECS-II and GEM format errors
Support all Stream 9 messages
Provide appropriate error handling

65. Error Messages Communication Error Message Scenarios
The Equipment will send these messages to report specific communication errors.
H E
Invalid Device ID S9F1
Invalid Stream Number S9F3
Invalid Function Number S9F5
Invalid Data Format S9F7
Reply Timeout (T3) S9F9
Invalid Data Length S9F11

66. Clock Requirements Maintain accurate system clock
Provide capability for Host to set date and time
Provide capability for Equipment to request date and time from Host (optional)

67. Clock Clock Management Scenarios
Equipment Requests Date and Time from Host
H E
Date/Time Request S2F17
Date and Time S2F18
Host Requests Date and Time from Equipment
Date/Time Request S2F17
Date and Time S2F18
Host Sets Equipment Date and Time
Date/Time Set S2F31
Acknowledge S2F32

68. Spooling Requirements
Provide sufficient Non-volatile storage for all primary messages that would normally occur during a processing cycle (Maximum Spool File Size)
Maintain Spooling State Model
Operator Spool State Display
Secondary (Reply) and Stream 1 messages are not spooled
All spooling-related variables and setup information should be maintained in non-volatile storage, and will retain all spooling context across a power-off
Resolve Multi-Block Inquire/Grant transactions during spool transmit

69. Spooling Spooling State Model At startup, the equipment returns to
the spool state it was in prior to the
system shutdown.
The only way for the equipment
can return to the Spool Inactive
state is for the Host to empty the
spool with an S6F23 message.
Messages going
to Host
Messages going
to Disk
Messages going
to Host from Disk

70. Spooling Host Spool Management Scenarios
Reset Spooling - Host Specifies Messages to be spooled
H E
Spool Reset S2F43
Acknowledge S2F44
Host Requests Spool Transmit or Purge H E
Transmit/Purge Request S6F23
Acknowledge S6F24

71. End