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Recommendations for Processing with MLS Copper

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Presentation on theme: "Recommendations for Processing with MLS Copper"— Presentation transcript:

1 Recommendations for Processing with MLS Copper
Process Station Recommendations Remark Reduce Handling No Pre-oven bake RTF foil is more susceptible to handling damage to the matte profile & contaminations. Pre-clean Micro-etch is not required Use acid for pre-cleaning, followed by a neutral to slightly caustic rinse. Complete drying Matte surface has already rough. Photo Resists Apply resists immediately after pre-clean Owing to better matte surface of RTF, it may need to slower down the feed rate, increase temperature or pressure.

2 Recommendations for Processing with MLS Copper
Process Station Recommendations Remark Expose Time (Imaging) Per shinning foil standard Developing Etching Similar to shinny foil, there is a chance to increase the line speed RTF foil profile at PP side is lower AOI More compatible to laser Technology Latest reflective technology is also applicable to RTF, copper surface need to be cleaned and no oxidation. Substrate reflective Copper reflective is more sensitive to surface cleanliness. Oxide Treatment Per shinny foil standard


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