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Published byProsper Shaw Modified over 6 years ago
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Chris Ober Director Don Tennant Director of Operations
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Cornell NanoScale Science & Technology Facility
NYSTAR Matching Grant Nanofabrication User Facility 17,000 sq ft Cleanroom located at Cornell University offering 130 major instruments and expert staff support and training for academic and industry projects. Key strengths include advanced lithography, plasma processing, atomic layer deposition, flexible material systems, inspection and characterization for a wide spanning materials set. Projects include: Nanoscale electronics, Carbon nanotubes and graphene; MEMS and NEMS; Life Sciences and Nanomedicine; Nanophotonics and optoelectronics; organics electronics; Spintronics and magnetics; energy storage and harvesting; and nanoagriculture.
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Electron microscopy Plasma Etching Thin Film Deposition Nanolithography
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17 Plasma Etchers plus PVD and PECVD
World’s most advanced Electron beam lithography 20 Furnace Tubes for Growth and Deposition
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Orthogonal began as a research project at Cornell NanoScale Facility; Spun off as startup to produce photoresist that is compatible with plastics and organic electronic materials. Now housed in former Kodak Labs in Rochester it produces materials for the flexible electronics industry.
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