1. Probe-card Healthness Check-up
Liu Dan & Yang Qiulian
Yonsei University
KoALICE National Workshop 2016

2. Contents Introduction Background and Objective Setup Check-up List
Contact Test
Needle Inspection
Summary

3. Introduction Sensor（MAPS） Sensor image Pad map 3 cm x 1.5 cm x 0.05 cm
67 pads
Probecard
Needle
Operation

4. Background & Objective
The probe-card is used repeatedly in the sensor test by the automated test equipment(ATE). For efficient operation, we need to maintain key elements including probecards in good condition. Therefore, we need to check probecard healthness regularly.

5. Setup Hardware Software Test program Sensor Probe station Power supply
Probecardv3

6. Check-up list Needle Inspection Contact test 2. Prober check-up
LED display
Scratch marks on pad
PC communication with probe card
2. Prober check-up
Needle Inspection

7. Contact test LED display Scratch marks on pad 8 LED bits
Many overlapping scratch marks

8. PC communication with probecard
Software: probecardv3

9. Needle inspection 1. Find out the strange needles. Typical one
Damaged one
Damaged one
Damaged one

10. 2. Inspect the location of the damaged needle tips
a) Check the needle position in (x,y) plane.
b) Check the planarity of the needle tips.

11. Needle position

12. a). Check x-y position Calibrate pixel size with good needle pairs.
( , ) um
(26,190) pixel
1 pixel = micron
( , ) um
(302, 190) pixel
Calibrate pixel size with good needle pairs.
Check the distance with the needle image.

13. b). Check planarity.
When needle tip is not at focal point, needle tip image blurs.
Procedure to determine the needle tip height accurately is
under development.

14. Summary
Probecards need regular check-up for the efficient operation of the ATE.
We are detailing the procedure to verify the probecard health.