1. Getting Started with TWB
Process & Device Simulation
Getting Started with TWB
School of Microelectronic Engineering

2. Right click > new terminal At the prompt, type: twb&
A workspace window will pop up. Workspace is the top-level window that displays Projects and network Machines
Each column in the projects page represents a project (book icon)
A book icon with and without pencil indicates write access to the project and read only, respectively
Each project consists of a Library and a list of Experiments
Double-click the book symbol will open the project Library and the icon changes to an open book
©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

3. Process recipe is represented by a graph of Modules
Double click one of the experiment. An experiment window will be displayed.
Experiment consists of process recipe, wafer flow, edit, toolkit, drivers.
Process recipe is represented by a graph of Modules
Wafer flow contains the wafer tree. Each wafer is associated to the left side module
©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

4. Double click one of the module to open the module window
Each module contains commands and parameters and uses driver to perform simulation
Command builder stores all the commands and parameters
©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

5. Getting Started with TWB
Driver invokes a simulator, load a structure file from previous simulation and save file for further simulation
Drag and drop suitable driver such as MEDICI for device simulation and TSUPREM4 for process simulation
©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

6. The wafer is a collection of simulation data
Double click the wafer to view data from various files
Various wafer icons show different simulation status
Simulation done with no error
Simulation fail, double click to see error message
Simulation is running
No action
©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

7. Toolkit is typically set for data visualization
To visualize data, drag and drop wafers onto suitable toolkit
©Semiconductor Physics Laboratory, School of Microelectronic Engineering, KUKUM

8. Your username & Password:
E.g. For PC no. 1:
Username: semicond21
Password: phys21
For PC no. 2:
Username: semicond22
Password:phys22

9. Next lab session, please bring a FLOPPY DISC to save files for your basic lab report