1. Microwave Devices - Microwave Passive Devices I - 6
2008 / 1 학기
서 광 석

2. 국방용 초고주파 시스템 (I) 장갑차 무인비행기 프리데이터 (Predator) 무인 자동차 경주대회 미국 국방부 주최
도심, 96km/6시간
1등 200만$, 2등 100만$

3. 밀리미터파(Ka-band)를 이용한 위상배열 고선명도 레이다 이미지 (0.1m 선명도)
국방용 초고주파 시스템 (II)
밀리미터파(Ka-band)를 이용한 위상배열 고선명도 레이다 이미지 (0.1m 선명도)
* Google Earth ; typically 15m 선명도
고선명도 서비스 m

4. Basics of Quality Factor
Energy stored during a cycle
Energy dissipated per cycle
(m: mass, b: damping, K:stiffness)
BAW
SAW, Two-port

5. Importance of High-Q Resonator
High-Q resonators play an important role in microwave circuits.
Insertion loss of small-ripple Chevyshev bandpass filter
fo: center frequency
BW: bandwidth of the filter
Qu: unloaded Q of the resonator
High-Q resonator  Narrow-band filter with a low insertion loss
Phase noise of oscillator
F: noise figure of the active circuit
Pavs: available signal power
QL: loaded Q of the resonator
High-Q resonator  high-frequency stable and low-phase-noise oscillator

6. Nanoelectromechanical (NEMS) Resonator
( Ref : K. L. Ekinci, et. al., “Nanoelectromechanical systems,” Review of Scientific Instruments 76, , 2005)

7. Q of Various Structures
resonators
Structure Q
Rectangular Waveguide (nonplanar)
8000
Slot resonator over cavity
500
Microstrip over membrane
234
Microstrip over Si
125
Dielectric Resonator (DR)
>10,000
QMin
QMax
Stability
(ppm/ºC)
LC Resonators 50
150
100
Cavity resonators
500
1,000 10
Dielectric resonators
2,000
10,000 1
SAW devices
300
0.1
Crystals
50,000
1,000,000
0.01
( Ref : Howard Hausman, MITEQ, 2007)

8. Radial-Contour Mode Disk Q >10,000 @ 1.9 GHz (vac) & (air)
MEMS Resonator
Wine-Glass Disk
Radial-Contour Mode Disk
Q ~ 62 MHz (vac)
Q ~ 98 MHz (air)
Freq.-Q Product ~1.0×1013
Q 1.9 GHz (vac) & (air)
Freq.-Q Product ~2×1013
( Ref : Clark T.-C. Nguyen, “MEMS technology for timing and frequency control,”    IEEE Trans. Ultrasonics, Ferroelectrics and Frequency control, p. 251, 2007)

9. Rectangular Waveguide
Waveguide Resonator
Rectangular Waveguide
Air-filled cubic waveguide 
( Ref : Collin, text)
Three Cavity Filter
Qun of Cavity =

10. Tunable RF Inductor with MetalMUMPs Process
(Ref.: )
d ; maximum separation of wires
MEMS Foundary Process (MEMSCAP)
– MetalMUMPs, PolyMUMPs, SOIMUMPs
Detail of MetalMUMPs Process
plated 20μm Ni/0.5μm Au
25μm deep Si trench with
KOH etch
(price: 1cmx1cm chip – 15 die
delivered  $3,700 academic)

11. Micromachined Microstrip Resonator Oscillator
[ Micromachined planar resonator with membrane structure]
[ Fabricated micromachined oscillator]
Measured loaded Q factor of the resonator :
190 with a coupling -4.6 dB
10-dB improvement in phase noise with
a micromachined planar resonator
[ Fabricated micromachined oscillator
with device mounted and ground plane cover assembled]
( Ref : A. R. Brown, et. al., IEEE Trans. MTT, p. 1504, 1999 )

12. Rectangular Coaxial Transmission Line in 3D-MERFS Program
DARPA’s 3-D MicroElectromagnetic Radio Frequency Systems Program
- ‘04-’07, 3D-MERFS Program (BAE, Rohm & Haas, and U. Colorado)
Rohm & Haas’s PolyStrataTM
Photoresist - sacrificial high-aspect
ratio photoresist (50 um to 100 um thick)
(Ref). “An Enabling New 3D Architecture for
Microwave Components and Systems,”
Microwave Journal, Feb. 2008
CMP for planarization
10~100μm thick Cu
(electroplated)
5~10metal layer process
310μm tall 50Ω
coaxial line 
Unloaded Q

13. Micromachined High-Q Cavity Resonator
Silicon wafer
Silicon wafer
[ An X-band micromachined resonator ]
[ S-parameters for the resonator ]
type
Size (mm x mm x mm) Qu
Non-planar
Metal (rectangular)
19.8 x 22.9 x 10.2
8119
16 x 32 x 0.465
526
planar
Micromachined cavity
506
Membrane-microstrip
5.3 x 7.1 x 0.35
234
Microstrip
2.65 x 3.55 x 0.5
125
Comparison of measured Q
for several resonators at X-band
@ 10.4 GHz
( Ref : J. Papapolymerou, et. al., IEEE MGWL, p. 168, 1997)

14. Micromachined Cavity Resonator Oscillator
[ Photograph of a fabricated oscillator ]
@ 33GHz
[ Schematic diagram of the micromachined cavity
resonator coupled to the GaAs-based oscillator ]
Estimated Q-factor of the cavity :
around 130 (without de-embedding)
18-dB improvement in phase noise with a
micromachined cavity resonator
[ Comparison of oscillation spectrum
between MCO and free running oscillator ]
( Ref : Y. Kwon, et. al., IEEE MGWL, p. 360, 1999 )

15. EFAB – Prototyping RF-MEMS Process
EFAB Process of Microfabrica Inc.
(Selective Electroplating Technique)
( Ref : E. D. Marsh, et. al., IEEE Trans. MTT, p. 78, 2007 )
Qun of

16. Micromachined Resonators for Higher Q-factor
Micromachined cavity resonator using
the split-block technique
Micromachined hemispheroidal
cavity resonator
Silicon <100>
[ Cross-section view of micromachined hemispheroidal cavity resonator ]
[ Cross-section view of micromachined cavity resonator using the split-block technique]
 Measured unloaded Q factor of 4550
at GHz
Measured unloaded Q factor are 1426
and 909 at 76.39, respectively
( Ref : S. R. McLlland, et. al., IEE Proc. Microw. Antennas Propag., October. 2004, p )
( Ref : S. R. McLlland, et. al., IEEE Trans. MTT, April. 2008, p )

17. FBAR structure of Avago Solidly Mounted Resonator (SMR)
FBAR and SMR-BAW
FBAR structure of Avago
Solidly Mounted Resonator (SMR)
BAW - Infineon

18. Substrate Integrated Waveguide ( I ) – PCB/MCM-L
( Ref : D. Deslandes and K. Wu, IEEE Trans. MTT, Feb. 2003, p )

19. Substrate Integrated Waveguide ( II )
( Ref : B. Liu, et al., IEEE MWCL, Jan. 2007, p )

20. Micromachined Cavity Resonator Filter
[ Measured results of the filter ]
[ Micromachined cavity resonator filter]
[ Side-view of micromachined cavity resonator filter ]
( Ref : L. Harle, et. al., IEEE Trans. MTT, p. 1598, 2004 )

21. Surface Micromachined Cavity Resonator Filter
[ surface micromachining cavity resonator filter ]
[ Fabrication flow ]
@ 60 GHz
Insertion loss of 2-pole filter: 1.42 dB
Insertion loss of 4-pole filter: 2.45 dB
( Ref : B. Pan, et. al., IEEE Trans. MTT, p. 959, 2008 )