1. Advisor : David T.W. Lin Reporter : Yu-Jie Shen
Date : 2017/06/23
Fabrication of the Force-feedback Sensor Based on the AlN Doped ZnO Piezoelectric Film
Advisor : David T.W. Lin
Reporter : Yu-Jie Shen

2. Outline 1 2 3 4 5 Introduction Purpose Experimental Method
Results and Discussions
Conclusion 1 2 3 4 5

3. Figure 1. The schematic of Da Vinci surgical system[2].
Introduction
The world of biosensors is expanding at a rapid pace with an ever increasing demand for more sensitive miniaturized devices[1].
In addition, the tactile sensor can be applied on the minimal invasive surgery.
Figure 1. The schematic of Da Vinci surgical system[2].

4. Purpose
To fabricate the force-feedback sensor based on the piezoelectric thin film.
To measure and define the relationship between the feedback electric current of bio-tissue.

5. Piezoelectric Principle
Piezoelectric effect is the ability of certain materials to generate an electric charge in response to applied mechanical stress[3].
Figure 2. Voltage applied to piezoelectric mater causes it to change shape[4]. 

6. Zinc Acetate Dihydrate
Solution parameters
Name
Chemical formula
Purity
Viscosity PH
Zinc Acetate Dihydrate
Zn(CH3COO)2∙2H2O
98%
6-7
Aluminum Nitride
AlN
99.5%,
65-75 nm, Hexagonal
Ethylene Glycol
C2H6O2
99%
21CPS
6-7.5
Ethanol
C2H5OH
99.4%
1.2CPS 7
Triethanolamine
C6H15NO3
10.5
Table 1. The parameters of AlN Doped ZnO solution.

7. High temperature furnace
Process parameters
Temperature
Time
Spin coating
Room temperature
600 RPM
800 RPM
1000 RPM
Heating
150 ℃
25 Mins
High temperature furnace
200 ℃
250 ℃
1 Hour
Table 2. The parameters of AlN Doped ZnO process.

8. Deposition methods
Many researchers reported that the deposition of the ZnO thin film using magneton sputtering and CVD but both methods are expensive.
Therefore the sol-gel spin coating method which is comparatively low cost and simple technique chosen to prepare nano structured ZnO thin film.

9. Deposition methods Sol-Gel Method Advantage Disadvantage
1. There are high purity and uniformity.
2. The ingredients are controlled easy.
3. The expensive vacuum equipment is
unnecessary.
4. The cost of process is low.
1.The cost of raw material is high and the reaction time is long.
2.The film is easy residual carbon.
3.The film is easy to agglomerate. 8

10. Flow chart of fabrication
Ethanol
Glycol
Zinc acetate
Triethanolamine
Stirring was continued for three hours holding the temperature 80 ℃
Aluminum Nitride
Deposition of 24hr
Atmospheric plasma
Spain coating
At 150˚C for 25min three time
High temperature furnace
X-ray Diffraction (XRD)
Scanning Electron Microscopy (SEM)
Oscilloscope test piezoelectric film

11. Powder preparation
Rigorous stirring
Deposition of 24hr
Atmospheric plasma
High
temperature furnace
Baking
Spin coating

12. Measurement

14. SEM (Scanning Electron Microscopy )
The SEM mode is detection of secondary electrons emitted by atoms excited by the electron beam.
The electron beam is generally scanned in a raster scan pattern, and the beam's position is combined with the detected signal to produce an image.

15. XRD (X-ray diffraction)
X-ray crystallography is a technique used for determining the atomic and molecular structure of a crystal, in which the crystalline atoms cause a beam of incident X-rays to diffract into many specific directions.

16. Results & Discussion (a) (b) (c)
Figure 3. The SEM photograph of AlN doped ZnO thin film, spin coating speed (a) 600 RPM (b) 800 RPM (c) 1000 RPM (annealing temperature:200°C)

17. Results & Discussion (a) (b) (c)
Figure 4. The SEM photograph of AlN doped ZnO thin film, spin coating speed (a) 600 RPM (b) 800 RPM (c) 1000 RPM (annealing temperature:250°C)

18. Results & Discussion
(a)
(b)
Figure 5. The XRD of AlN doped ZnO thin film with different spin coating speed (a)annealing temperature at 200℃ ; (b) annealing temperature at 250℃.

19. Results & Discussion
Figure 6. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (600 RPM).

20. Results & Discussion
Figure 7. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (800 RPM).

21. Results & Discussion
Figure 8. Voltage response of AlN doped ZnO thin film of tactile sensor with force-feedback test (0.5N-2.5N)on polyimide and copper cladded substrate (1000 RPM).

22. Conclusion
In this study, the fabrication of the force-feedback sensor based on the piezoelectric thin film is developed.
To integrate and force feedback sensor and Arduino devices.
The best force-feedback response is 1000 RPM on the copper.

23. References
[1] [2] Paul J. Johnson, MS, David E. Schmidt, PhD, and Umamaheswar Duvvuri, MD, PhD“Output control of da Vinci surgical system’s surgical graspers”, Science Direct, Vol. 186, pp.56-62, [3] Yingbin Bian, Moning Liua, Genshui Ke, Yigang Chen, Jim DiBattista, Eason Chan, Yimou Yang“Aluminum nitride thin film growth and applications for heat dissipation” Surface & Coatings Technology, Vol pp , [4] David T.W. Lin, You-Peng Yuan, Yuh Chung Hu“Fabrication of ZnO Thin Film Sensor for CO2 Monitoring.” IEEA Environment, Energy and Applications, 2015.

24. Thank you for your attention
That’s all my presentation, thank you for your attention.