1. Automatic alignment of a diffraction phase microscope for wafer defect inspection
Graduate mentor: Renjie Zhou
Faculty mentor: Lynford Goddard
By: Melissa Crawford
(undergraduate student)

2. Project Summary
The project involve creating a motion controlled stage that is a double to part of a setup in another lab. On this setup I am working to precisely place a very small pinhole in the Fourier plane of a diffraction phase microscope. On this setup I am trying to create an automatic alignment system and the control code to go along with it. When I am done with my part of the project, it has to be transferred to the overall setup. My work is to help improve the stability of this microscope tool and save a lot of time that investigators currently spend on performing alignment.

3. 1. General Lab Safety: http://www.drs.illinois.edu/training/index.aspx
2. Laser Safety: 
3. Electrical Safety:  4. Attached safety documents 
Paper
Optically monitoring and controlling nanoscale topography during semiconductor etching --
Additional information
Product manuals
Fourier Transforms
General Optics  
Coding
Matlab
Laview

4. Tasks 2/25/13 Build basic assembly for holding pinhole filter
3/5/13 Create and initial alignment system to get close
3/19/13 Alignment system to finely adjust system to optimal location
4/1/13 Transition system to Beckman
4/10/13 Summarize results