1. Energy Technology Production-related and non-destructive analysis of
functional surfaces

2. NanoFocus-Technology
µsurf® 3D-Microscope
µscan® 2D-Profilometre
µsprint® 3D-Profilometre
3D-Structure
Wear and Tear
Tribology
2D-Form
Roughness
3D-Form
Inspection
Production control 2

3. Comparison of μsurf technology to SEM and stylus
Structured Surface
100 µm × 90 µm
REM: Alcan Research Center, Neuhausen
REM
µsurf®
Stylus
µsurf®
99% Correlation (KKF) (Measurement results from NIST)

4. µsurf-Principle

5. Laser seam for Li-ion battery
Welding Process Drift

6. Fuel cells Electrode Fuel Cell Increase performance
Gas diffusion layer
Increase performance
Reduce production costs
Improve life span
Reduce size

7. Measurement of fuel cells
Flatness, waviness
Roughness
Porosity
Fibre texture, fibre diameter
Particle size distribution, electrode microstructure
Layer thickness of the polymer, the entire MEA
Qualitative parameters such as cracks, holes and other defects

8. Gas diffusion layer

9. Solid oxide fuel cell (SOFC)
Reliable analysis of flatness and ripple

10. Determination of roughness according to DIN EN ISO
SOFC
Series of 49 profiles
Determination of roughness according to DIN EN ISO
8x1-Stitching

11. User friendly analysis software
SOFC
Grain distribution
User friendly analysis software

12. Volume of the valleys and peaks per area
Porosity
Sk-Parameter
Volume of the valleys and peaks per area

13. Measurement and analysis of edge region of electrode layer
Layer thickness
Measurement and analysis of edge region of electrode layer

14. Grain structure
Determination of parameters such as size, form factor, size of the individual grains, etc.

15. Metallic bipolar plate
Measurement of flatness and geometry

16. Verification of geometrical parameters
Bipolar wafer
Verification of geometrical parameters

17. Hole in the electrode layer Catalyst accumulation
Defect Analysis
Hole in the electrode layer
Catalyst accumulation
Wrinkles and cracks

18. References