1. Date of download: 12/22/2017
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From: Optical Effects of Surface Finish by Ultraprecision Single Point Diamond Machining
J. Manuf. Sci. Eng. 2010;132(2): doi: /
Figure Legend:
Comparison of typical Veeco profilometer and optical scattering measurements: (a) 3D plot showing typical surface profile measured by profilometer, (b) calculated surface profile spectrum in x direction based on the Veeco measurement, (c) directly measured optical scattering in x direction for the same sample, and (d) comparison of the peak-background ratio of the Veeco profilometer and direct optical scattering measurements