1. RF Matching Network Description
Energy for creating the plasma in the STS systems is supplied by a radio frequency generator. The Process (plasma) chamber must be matched to the electrical impedance of the RF power transmission line.
A mismatch would result in power being reflected into the source which would affect the plasma process. Matching is achieved by fitting an auto-matching unit between the Rf generator output and the plasma chamber.
In order to continuously monitor the efficiency of matching between load and RF source, thus detecting if control adjustments are required, the first device in the RF line output from the generator is the reflectometer (Mag Phase unit).
In order to measure the performance of the matching unit, its impedance as seen by the RF source must be determined. This is achieved by fitting a detector in the RF line between the RF generator and matching unit, in order to measure the magnitude and phase angle of the load impedance.
The detector generates error correction signal as a result of a mismatch and this is passed to the automatic matching module (AMC1).

2. AMC1 Module       Electrical Select (Not Used)
 IN Socket (Not Used) 
 OUT Socket (Not Used) 
 Matching Unit Control 
 Magnitude/Phase Detector  

3. AMC1 Module         Power Supply  Eprom
 Secondary Address Switch  
 Fuses and Test Points
 Programmable IC 
 Serial Coms Chips 
 Links 

4. ICP AMC1 Module Control Balun Type AMC1 RF Matching Unit P M M P
Coil
Tune
Balun Type
RF Matching Unit
AMC1 P M
Tune
Load M P
Tune
PFC Master
Load
Magnitude
and
Phase Detector
MU Control
Mag/Phase Input RF
Generator
Interlocks OK

5. AMC Module Switch Settings
Page 24
AMC Platen SW
Master On On On On
Link 1 In for Vacuum Type Out for Air Type
Link 2 In for Vacuum Type Out for Air Type
Secondary Address 7
AMC Coil SW
Master Off On On On
Link 1 In for Vacuum Type Out for Air Type
Link 2 In for Vacuum Type Out for Air Type
Secondary Address 6

6. AMC1 Module Control ELECTRODE AMC1 P M RF Matching Unit M P PFC Master
Tune
AMC1 P M
Tune RF
Matching Unit M
Load P
PFC Master
Load
MU Control
Magnitude
and
Phase Detector
Mag/Phase Input RF
Generator
Interlocks OK

7. Magnitude and Phase Detector
The servo loop consists of power op amps IC3 and IC4 for driving the Tune and Load capacitor drive motors, error amplifiers consisting of IC12 (output pins 1 for the load and pin 8 for the Tune), and two loop gain amplifiers of IC5.
The feedback position of the Load and Tune capacitors are converted to digital data by an A to D convertor IC16 for metering by turning on the appropriate switch of IC10 (pin 16 for Load and pin 9 for Tune

8. ICP RF Interlocks 0 v 0 v RL2 RL1 +24 v Coolant 1 Coolant 2 Clamp On
RF Encl
+24 v
Coolant 1
1. DI Meter
2. Flow Switch
Coolant 2
1. Heated Lid
Temperature
Controller
Clamp On
Magnetic Reed
Switch
RF Enclosure
2 Micro - Switches
Gate Closed
Magnetic Reed
Switch
He Backside
Cooling
HBC Module Trip Points
Platen Matching
Unit
2 Micro-Switches
Top Matching
Unit
1 Micro - Switch
Gate Closed
He Cool
Bottom Mu
Top Mu
Interlock ok
RL3

9. Serial Communications
 +24V Supply
 Wiring
 Module PSU
 Serial Chips
 Computer Coms Card
 Computer Failure

10. ICP Process Sequence Standby Process Etch Process Chamber Preparation
Gas
Stabilization
Process Time
Process
Timer
Finished
Matching Unit Capacitors go to their start position
Process Gases Switch On
Process Timer Starts
Process Timer Stops
RF Switches On
RF Switches Off
APC Goes to position
Gases Running
Gases Off
Pumps to Base
Process pressure Stabilize
Pumps to Base
Vac Pressure
Vac Hi Vac OPN
AMC Drive Caps
PFC Gases
Vac APC
PFC Gases Control
PFC RF on
PFC Timer
EPD Waiting for End Point
PFC Gases Off
PFC RF Off
PFC Timer Finished
EPD End Point Achieved