1. Eagle XG® display glass by ellipsometry
A Surface Science Spectra submission
Cody V. Cushman,1 Brandon A. Sturgell,1 Andrew Martin,2Barry M. Lunt,3 Nicholas J. Smith,4
and Matthew R. Linford1*
1Brigham Young University Department of Chemistry and Biochemistry. 2J. A. Woollam Co. Inc. 3Corning Incorporated. 4Brigham Young University Department of Information Technology
*Corresponding author
Introduction
Eagle XG® is a display glass used as a substrate for electronic displays in cellular phones, computers and televisions. This glass is ubiquitous in electronic devices and is used for a growing number of non-display applications. Therefore, reference spectra of this material are of growing importance. Spectroscopic ellipsometry (SE) characterizes materials using polarized light. Through modeling, SE provides information about film thicknesses, surface and interfacial roughnesses, mixing of layers, etc. Here, we used SE to measure the optical constants of Eagle XG. We have submitted this data to Surface Science Spectra, a peer-reviewed data base, so that these results can archived and used for modeling SE data for samples in which Eagle XG is a substrate (e.g. Eagle XG® with thin films deposited thereon).
Results
The optical constants of the glass were modeled using two different oscillator models. The first used 2 Gaussian oscillators and 2 poles. The second used a Tauc-Lorentz (T-L), a Gaussian, and 2 Poles. Both models gave similar optical constants, surface roughnesses of 0.5 nm, and mean squared errors (MSEs) of ca Selected data is shown below.
Optical Constants
Raw data vs. Model
experimental
modeled
Approach
Sample Preparation
Back side roughened for ellipsometry
Unroughened for Transmission 1.
Selected References
1. Synowicki, R. A.; Johs, B. D.; Martin, A. C., Optical properties of soda-lime float glass from spectroscopic ellipsometry. Thin Solid Films 2011, 519 (9), Tan, G. L.; Lemon, M. F.; French, R. H., Optical properties and London dispersion forces of amorphous silica determined by vacuum ultraviolet spectroscopy and spectroscopic ellipsometry. Journal of the American Ceramic Society 2003, 86 (11), Jellison, G.; Sales, B., Determination of the optical functions of transparent glasses by using spectroscopic ellipsometry. Applied optics 1991, 30 (30), Jellison Jr, G.; Modine, F., Parameterization of the optical functions of amorphous materials in the interband region. Applied Physics Letters 1996, 69 (3), Jellison Jr, G.; Modine, F., Erratum: "Parameterization of the optical functions of amorphous materials in the interband region ". Applied Physics Letters 1996, 69 (14), 2137.
We acknowledge funding for this study from Corning Incorporated
BEMA 50/50 vol. frac.
Void/Glass
Modeling
Oscillator Model
2 Gaussians or
T-L + Gaussian
Data Acquisition
Ellipsometry at 52°, 57°, 62°, and 67°
Transmission measured at normal incidence 2.
Prefit: B-spline