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Summary of Samples Photolithography Samples: EBL Samples:

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Presentation on theme: "Summary of Samples Photolithography Samples: EBL Samples:"— Presentation transcript:

1 Summary of Samples Photolithography Samples: EBL Samples:
Pieces mask Bonding Si thinning Ni Dots Pillar Etching 2 PL-mask 4 ✔ 10 um 1um size 80 um EBL Samples: 3 pieces of EP1, 3 pieces of EP2, and 5 pieces of EP3, was written in CINT Pieces mask Bonding Si thinning Ni Dots Pillar Etching 2 EP1_Linear ✔ 1 EP2_HiDens EP3_NetW

2 Sample #: 131016D 2 um Pillar Etching 100nm SiO2 Deposite
PMMA A4 Spin-coating (~ 300nm)

3 Summary of Masks PL-mask 4 PL-mask 6 EP1_Linear EP2_HighDensity
3um line width, 2um space EP1_Linear EP2_HighDensity EP3_Network 300nm line width, 500nm space, 500nm tip 300nm line width, 700nm space, 500nm tip 300nm line width, 500nm tip

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