1. MOSFET CAPACITANCES Very Large Scale Integration 1 - VLSI 1
Selçuk İLKE, Umut YILMAZER, Mehmet BATI
ITU VLSI Laboratories
Istanbul Technical University

2. MOS CAPACITANCES There are three main forms:
Gate capacitance (gate of transistor)
Diffusion capacitance (drain region)
Routing capacitance (metal, etc.)
intrinsic capacitances
oxide capacitances
extrinsic capacitances
Depletion capacitance
Junction capacitances
Overlap capacitances
(operation region independent)
Direct overlap Outer fringe Inner fringe

3. MOS CAPACITANCES Triode Region Saturation Region Cut-Off Region
(Drain no longer connected to the channel)
(Conducting channel region completely gone)

4. MOS CAPACITANCES Concerns about MOS C’s charge conservation problems
‘charge based models’
capacitance matrix
non-reciprocal capacitances
short channel effects
non-quasi-static effects

5. REFERENCES
Threshold Voltage and MOSFET Capacitances, Mark Lundstrom, 2006
Metal Oxide Semiconductor Field Effect Transistors, Dr. Sabar D. Hutagalung
MOS TRANSISTOR THEORY, Kenneth R. Laker, University of Pennsylvania