1. Update from Birmingham
Phil Allport, Daniel Briglin,
Kostas Nikolopoulos, Simon Pyatt,
Juergen Thomas, John Wilson
WP3 Meeting
29th September 2016 1

2. TM Module Metrology Update

3. TM Hybrid Panel – TM3

4. TM Hybrid Panel – TM3 1. Circular scan on Glass ASIC surface.
2. Double Point Scan on each fiducial.
3. Calculate distance between planes and subtract 300μm to attain Glue gap
ASIC Surface to Touchdown pad

5. Laser Measurement Scans in red
TM Module Measurement
Right Hand Hybrid
Left Hand Hybrid
Laser Measurement Scans in red

6. Measurements in Microns
TM Module Measurement
Right Hand Hybrid
Left Hand Hybrid
699
772
Glue gap
316
380
Glue gap
Initial Assumptions; Hybrid = 300, ASIC = 300 Uncertainty over hybrid thickness has led to Right Upper being mounted with low glue thickness but no glue seepage
Measurements in Microns
 Check Hybrid and glass ASIC dimensions

7. Glass ASIC Measurement Smart Scope vs Micrometre
Measured 15 pattern glass ASIC using OGP Smart Scope and a Micrometre.
Glass ASIC
Micrometre
OGP Smart scope
(Microns) 1
294
290 -4 2
299
301 3
283 4
288 5
285
282 -3 6
279 7
298 8
291 9 10
289
292 11
295 12 13
287 -1 14 -5 15
Average
0.2
Measurement program on Smart Scope

8. Glass ASIC Measurement Smart Scope vs Micrometre
Excellent agreement between Micrometre and Smart Scope results

9. TM4 – Hybrid 0 Measurement
Methods of measurement
Micrometre was used to measure the thickness of each ASIC pad (red circle)
Linear scan was used to measure the thickness of each ASIC pad (red line)
Circular scan was used to measure the thickness of each ASIC pad (red circle)

10. TM4 – Hybrid 0 Measurement
Good agreement between Micrometre and Smart Scope circular scan – The average difference between the Micrometre and the Smart Scope is 3.40 (± 2.59) microns.