1. Precision Linear Motorized Stages
Proteep Mallik
OPTI 521 Tutorial Presentation
December 4, 2006

2. Precision Linear Motorized Stages
Long travel (~2m)
High precision (~nm level)
Stepper drives
Parker Motion products
September 18, 2018
OPTI 521 Tutorial Presentation

3. OPTI 521 Tutorial Presentation
Outline
Motion Control
what, where and why?
System Components
stage (long range)
motor (servo vs stepper)
controller
computer/software
Examples
vendors
specifications
cost
Parker Motion System
Linear sliders and stages
6K controller
Computer & monitor
Null test system
Conclusions
September 18, 2018
OPTI 521 Tutorial Presentation

4. OPTI 521 Tutorial Presentation
Motion Control
Precise positioning of optics and mechanics
Used in:
laser machining, welding
printing, patterning
wafer fabrication, lithography
robotics
… and of course, in many optical systems
September 18, 2018
OPTI 521 Tutorial Presentation

5. OPTI 521 Tutorial Presentation
Motion Control
Why motorized?
repeatable, precise and smooth
moving heavy parts
automation
easy to manage complex systems
less manpower
September 18, 2018
OPTI 521 Tutorial Presentation

6. System Components -overall system
ROTARY BRAKE
SHAFT BRAKE
September 18, 2018
OPTI 521 Tutorial Presentation

7. System Components -stage
Range of travel (~ 2m)
Precision (~ nm)
Repeatability (~ sub nm)
Stiffness (extruded Al, excellent)
Motor requirements (torque, efficiency)
Cost (~$5000)
Ease of operation (cabling, computer control)
Mount on large, flat surface (minimum deflection)
September 18, 2018
OPTI 521 Tutorial Presentation

8. System Components -motor
Servo
Ironcore, ironless, slotless
Typical repeatability ~1nm, resolution ~0.01nm
Needs position encoders
Very smooth, fast motion for large loads
AC or DC, high voltage
Expensive (~$5000 +)
Stepper
Multi-pole motors
N-bit encoders (2N bits/step)
Repeatability ~10nm, resolution ~sub nm
No need for position encoder
Easier maintenance and lower cost than servo
September 18, 2018
OPTI 521 Tutorial Presentation

9. System Components -controllers
Interfaces user to linear stage
via computer or remote control
Drive, encoder, limit and communication inputs
Programmable
September 18, 2018
OPTI 521 Tutorial Presentation

10. System Components -computer
RS-232 or ethernet communication
Software from manufacturer
Programming via Active X or other windows platforms
Industrial computers, touchscreen control monitors
September 18, 2018
OPTI 521 Tutorial Presentation

11. OPTI 521 Tutorial Presentation
Vendors
Parker Automation (Parker Hannifin, Daedal Positioning, Compumotor)
Aerotech
Velmex
Newmark
September 18, 2018
OPTI 521 Tutorial Presentation

12. OPTI 521 Tutorial Presentation
Specifications
Image
$1800
$800
$5000
$2000
$25,000
$15,000
Cost
150kg
16kg
630kg
1000kg
50kg
135kg
Max Load
4μm
2.5μm
1.3μm
0.1nm
0.4μm
0.5μm
Repeatability
6μm
(not given)
0.06nm
0.001μm
Resolution 2m
0.8m
1.5m
1.2m 1m
Total Travel
BiSlide
XSlide
406XR
400ST
ABL2000
ALS5000
Velmex
(stepper)
Parker
Aerotech
(servo)
September 18, 2018
OPTI 521 Tutorial Presentation

13. Parker Automation www.parkermotion.com 400ST Square Rail Sliders
406XR Series Sliders
Drive and Motor
Screw with stepper motor
Linear bearing, ballscrew & motor
Total Travel
1.5m 2m
Max acceleration
20m/s2
Repeatability
0.1nm
1.3μm
Maximum Load
1000kg
630kg
Stage Weight
25kg
2.7kg
Size
2m X 0.2m X 0.12m
2.3m X 0.15m X 0.05m
Cost
$2000
Up to $5000
September 18, 2018
OPTI 521 Tutorial Presentation

14. OPTI 521 Tutorial Presentation
Parker Automation
Workstations
Ethernet communication with controllers
Controllers can be used in client-server modes
Controllers can be connected to each other via ethernet hub
Touchscreen monitors
September 18, 2018
OPTI 521 Tutorial Presentation

15. OPTI 521 Tutorial Presentation
Null Test System
3-axis stage
Tilt stage
CGH positioning stage
September 18, 2018
OPTI 521 Tutorial Presentation

16. OPTI 521 Tutorial Presentation
Null Test System
6K8 Controller
Drivers (7)
Computer communication
Input Power Supply
5A drivers/motors
20A, 120V AC input power
September 18, 2018
OPTI 521 Tutorial Presentation

17. OPTI 521 Tutorial Presentation
Conclusions
Precision motion control a reality and necessity
3 choices to make: stage, motor, controller
Complete automation via computer and available software
September 18, 2018
OPTI 521 Tutorial Presentation