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2. Module 1: Safety
Module 1: Safety

3. Safety Rules
Follow these safety rules before operating any Mega Fluid Systems, Inc. equipment:
Safety Rules
Maintain compliance with all local, state, and federal regulations, ordinances, laws, etc., that require handling all processing solutions, chemicals, and acids, as well as all wastes produced by this system.
All personnel must have proper training in related safety procedures. Do not allow unauthorized or untrained personnel in the area of the system.
Personal Protective Equipment (PPE) is required. Follow requirements listed in the MSDS for the appropriate chemical. Follow all site specific rules for PPE.
Treat all chemical exposures as potentially serious. Neutralize and irrigate the exposed area and seek first aid immediately as outlined in the MSDS.
Use extreme caution when working with electrical equipment. Always assume high voltage exists; use lockout and tagout procedures during maintenance.
Treat all chemical spills or leaks as hazardous and clean up immediately.

4. Safety Features Emergency Machine Off (EMO) Door Interlocks
The EMO provides the means to immediately shut down the tool. Pressing the EMO button immediately interrupts system power and stops all tool functions.
Safety Features
Door Interlocks
Opening an interlocked door shuts down the system (unless the interlock bypass is activated)
To prevent disrupting chemical/slurry dispense, bypass interlocked doors before opening (as needed; return to normal operating mode as soon as possible)
Leak Detectors
Stops the tool and activates a critical alarm

5. Safety Hazards & Symbols
Pay attention to system labeling!
Safety Hazards & Symbols
DANGER
Pick one
(until you’ve picked all 3)
WARNING
CAUTION

6. Safety Hazards & Symbols
Pay attention to system labeling!
Safety Hazards & Symbols
DANGER
DANGER indicates a hazardous situation which, if not avoided, WILL result in death or serious injury.
WARNING
CAUTION

7. Safety Hazards & Symbols
Pay attention to system labeling!
Safety Hazards & Symbols
DANGER
WARNING indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury.
WARNING
CAUTION

8. Safety Hazards & Symbols
Pay attention to system labeling!
Safety Hazards & Symbols
DANGER
CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injuries.
WARNING
CAUTION

9. Lockout/Tagout
Bleed off the pressure or flush all lines carrying hazardous chemicals.
Turn off or return all operating controls to the neutral mode.
Relieve, disconnect, restrain, or otherwise render safe residual or stored energy such as capacitors, gas, steam, water pressure, air, and hydraulic.
Lockout/Tagout
Place the AC disconnect switch in the Off position.
Place and lock a padlock on the disconnect switch.
Attach a lockout tag to the switch, which indicates the system is locked out for service purposes and identifies those employees authorized to remove the lock and tag.
Test the valve or switch to ensure the control cannot be moved to the activated position.
Ensure all energy sources have been de-energized on dual or multi-energy source operations prior to beginning work.
Re-test the machine controls or equipment to verify the operation is positively off.

10. EMO button must be accessible!
Emergency Off (EMO)
The EMO provides the means to immediately shut down the tool. Pressing the EMO button immediately interrupts system power and stops all tool functions.
CAUTION
EMO button must be accessible!
Never disable or cover an EMO button. This can prevent the system from being stopped in the event of an emergency.
Emergency Off (EMO)
Pressing the EMO button is not a safe alternative to the prescribed lockout/tagout procedure.

11. Key Failure Points
The following procedures (but not limited to) may place you at risk of chemical exposure:
Changing out an empty supply drum/tote
Sampling system chemical
Flushing the system
Checking for leaks
Performing a particle count
Transporting chemicals to the system
Filling the pipes with air
Clean flushing the drums/totes and pipes
Changing pumps, valves, filters, pressure switches, etc.
Handling PPE after use
Key Failure Points
The following procedures (but not limited to) may place you at risk of electrical exposure:
Testing system communications
Testing the interlock systems (if present)
Testing the chemical demand signal

12. Spill Mitigation
Mega systems are designed to minimize the possibility of an unwanted chemical release. The cabinet is designed to contain 110% of the total piping volume plus the total contents of the largest reservoir.
If a spill should happen:
Treat all chemical spills as extremely hazardous.
Notify the proper site authority.
Follow all site specific rules for chemical spills.
Follow all information contained in the MSDS.
If possible, contain the spill with absorbent barriers.
If possible, neutralize the spill according to the MSDS.
Spill Mitigation

13. Module 2: System Overview
The Mega MPC25A-U Chemical Dispense System transfers chemical from either a tote or a drum supply to a day tank.
The chemical is circulated in the day tank and then dispensed to a valve manifold box (VMB) or to a single point-of-use (POU).
The illustrations at right show some of the system configurations, which may include a drum supply platform.
The complete MPC25A-U system line is described in System Configurations.
Module 2: System Overview
Mega MPC25A-U,
Models 101, 103, 105, 107
(no drum platform)
Mega MPC25A-U,
Models 102, 108, 109
(with drum platform)

14. Sequence of Operations Overview
Tote/Drum Operation
Depending on system configuration, a tote or a 55 gallon drum serves as the chemical source for the MPC25A-U.
Chemical is transferred from the tote or drum supply to the day tank.
To ensure a constant supply of chemical, the operator needs to change the tote/drum when a low sensor indicates its supply is nearly depleted.
SOO Overview
Day Tank Operation
Starting with an empty tank, the 200L Mega MPC25A-U day tank fills with chemical from the tote or drum supply (depending on the system configuration) until the day tank high level sensor is actuated.
If no demands for chemical are received, the chemical is circulated in the day tank.
When a chemical demand is received, tank circulation stops and the system dispenses chemical to the VMB or point-of-use.
A level sensor in the day tank detects when the tank’s chemical capacity is low, then initiates another chemical transfer from the tote or drum supply to refill the tank until the full level is reached.
This sequence of falling below the chemical fill level and refilling above the full level repeats indefinitely until operator or alarm intervention occurs (tote/drum supply replacement, flush purge, critical/process alarm).

15. Sequence of Operations Overview, continued
Distribution
The distribution operation supplies chemical from the day tank to the VMB or POU on the global supply line.
A pressure transducer on the dispense line monitors pressure exiting the system. The system also monitors the flow rate of chemical exiting the tool at any time during the dispense process.
An alarm is activated if the dispense operation is interrupted.
SOO Overview
Day Tank
VMB

16. Sequence of Operations Overview, continued
Distribution Sampling
The operator can take a chemical sample from the distribution system to verify batch consistency. The required PPE should always be worn to prevent chemical injuries.
The operator uses the touch screen to set the Dispense system in Manual mode. Next, the operator uses the touch screen to enable the Door Bypass so the cabinet doors can be opened without shutting down the system.
SOO Overview
After the appropriate valves are manually opened or closed, the operator places the sample container and acquires the sample.
When the sample container is removed, the door bypass is disabled.
Manual mode
Door Bypass

17. Sequence of Operations Overview, continued
Flush/Purge
The chemical transfer lines and the day tank dispense circuit can be manually flushed and purged during service periods. The flush and purge operations can be performed after the operator uses the touch screen to place the system in Manual mode and enable the door bypass.
SOO Overview
For systems equipped with a VMB on the terminal end of the dispense line, a manual drain valve allows chemical to be flushed out of the global supply line.
The operator manually opens or closes the appropriate valves to drain the transfer lines or the day tank of residual chemical.
Next, DI water is added to the lines or the tank to a prescribed level so the flush liquid is circulated through the loop for a defined duration.
Finally, the flush liquid is pumped to drain until the gravity drains empty any residual liquid.
To restore the system, the operator disables the door bypass and places the MPC25A-U in Auto mode.
Manual mode
Door Bypass

18. System Configurations
MPC25A-U, Models 101, 103, 105, and 107 (no drum platform)
System Configurations
Controls cabinet
Day tank
Process cabinet
Day tank platform and drip container
The MPC25A-U, Models 101, 103, 105, and 107 use a tote for supplying chemical, so no drum platform is used. The day tank is positioned on the right side of the Controls and Process cabinets.

19. System Configurations, continued
MPC25A-U, Models 102, 108, and 109 (with drum platform)
System Configurations
Drum platform
and drip container
The MPC25A-U, Models 102, 108, and 109 use a drum for chemical supply, and the drum platform serves as a drip container. The day tank is positioned on the right side of the Controls and Process cabinets.

20. System Configurations, continued
MPC25A-U, Models 104 and 106
System Configurations
MPC25A-U, Model 104 (tote)
MPC25A-U, Model 106 (tote)
The MPC25A-U, Model 104 and Model 106 use a tote for chemical supply, and the day tank is positioned on the left side of the Controls and Process cabinets.

21. Module 3: Operation
Module 3: Operation

22. HMI Overview Touch Screen
Many system operations are selected and controlled from the touch screen interface. The sample screen below highlights some of the common touch screen interface elements.
HMI Overview
Logon Status
Screen Navigation Tabs
System Status Area
Operational Control Buttons
Valve/Pump Control Switches
Alarm Notification Area

23. System Startup
The system is initially set up and powered on by an operator or engineer with an administrative password.
Refer to Restarting after EMO if restarting the system.
Toggle the AC disconnect switch to the ON position.
Ensure the EMO is disengaged (pulled out).
Press the green Start button on the front of the Controls cabinet.
System Startup
When startup is complete, the System Overview screen appears.

24. Log On/Log Off Password Permissions
The user password authorizes the operator to view and edit various controls in the system.
The touch screen interface is set up with the following password permission levels:
Log On/Log Off
Default – The operator can view major screens in the system.
Operator - The operator can start and stop processes, take samples, and calibrate system components.
Maintenance - The operator has additional privileges for bypassing door interlocks and manually opening and closing valves.
Engineer - The user has complete controls access, including the ability to change setpoints and alarm severity.

25. Log On/Log Off, continued
Logging On
Press Log On at the top of the touch screen interface.
In the Log In screen, press the User Name field to enter a name.
Use the on-screen keyboard to input a user name, then press Enter. Note: Your logon user name appears as the system user on the touch screen.
Press the Password field to enter the logon password.
Log On/Log Off
Use the on-screen keyboard to input a password, then press Enter.
Press OK in the Log In screen to submit the credentials.
Note: If your logon credentials are rejected then you are logged on as Default, with limited system control access.
Logging Off
Press Log Off to log out of the system.

26. Auto/Manual control mode buttons
Automatic Operation
The following procedure places the Transfer System and Dispense System into Automatic operation.
Log on with Maintenance or Engineer credentials to place the system in Manual mode.
Press the Manual Controls tab at the top of the touch screen interface.
Press the Auto/Manual control mode buttons for the Transfer System and Dispense System to toggle the systems to Auto operation.
Automatic Operation
Auto/Manual control mode buttons

27. Monitor the System in Manual Mode!
Manual Operation
Placing the system in Manual mode de-energizes all solenoid valves. All valves are set in their normal (safe) state when Manual mode is activated.
In Manual mode, combinations of valves can accidentally be opened or closed that are outside the scope of the equipment design. The operator assumes all responsibility for running the system in Manual mode.
If …
Start…
Opening valves
Downstream and move in the upstream direction.
Closing valves
Upstream and move downstream.
Manual Operation
CAUTION
Monitor the System in Manual Mode!
Some alarms may not function in Manual mode. Potential hazards may be created. Use caution.
Return the system to Auto mode as soon as possible.

28. Manual Operation, continued
Log on with Maintenance or Engineer credentials to place the system in Manual mode.
Press the Manual Controls tab at the top of the touch screen interface.
Press the Auto/Manual control mode buttons to toggle the Transfer System and Dispense System to Manual operation.
Press the desired pump or valve control switches for the Transfer and Dispense systems to manually open or close them.
Manual Operation
Pump/valve control switches
Auto/Manual control mode buttons

29. Restarting after EMO
If the system shuts down while running an operation, it does not continue where it left off after the restart.
The system may need to be manually flushed and purged to ensure batch integrity. See Flush/Purge for details.
If the system is shut down due to an EMO condition, pull the EMO button out before the next step.
Press the green Start button.
After the system fully initializes, continue with the steps in Flush/Purge.
Restarting after EMO

30. Obtain Appropriate Authorization!
Flush/Purge
Flush and purge operations may be necessary if process parameters are out of specification range, if the batch becomes contaminated, or if the system was unexpectedly shut down.
A flush/purge is used to drain and flush the day tank, and when a thorough cleaning is necessary.
A gravity drain dumps the entire day tank contents to the drain, but residual fluid is left in the process piping.
NOTICE
Obtain Appropriate Authorization!
Flush/purge dumps the tank contents to the drain. Obtain authorization before proceeding with a flush/purge.
Flush/Purge

31. Flush/Purge, continued
Manually Flushing the Transfer System
On the Manual Controls screen, press the Auto/Manual Transfer System button to place the Transfer System in Manual mode. See the figure below.
On the Manual Controls screen, press the AV-C01 Transfer Pump Inlet Valve and the AV-G01 Transfer Pump control switches to set them to Closed.
Close valves MV-C01 and MV-C03, then open valves MV-C02 and MV-D04.
Connect the MV-W05 line to the manual flush/purge port upstream from the pump.
Open MV-W05.
Flush/Purge
On the Manual Controls screen, toggle control switch AV-G01 Transfer Pump to Open to start the flush process.
When the flush sequence is complete, close MV-W05.
On the Manual Controls screen, toggle control switch AV-G01 Transfer Pump to Closed to start the drain process.
When the drain sequence is complete, close MV-D04, MV-C02, and MV-C01. 2
2, 6, 8 1
Note: The numbers in this Manual Controls screen figure indicate the controls referenced in the procedure’s numbered steps describing this screen.

32. Flush/Purge, continued
Manually Purging the Transfer System
On the Manual Controls screen, press the Auto/Manual Transfer System button to place the Transfer System in Manual mode. See the figure below.
On the Manual Controls screen, press the AV-C01 Transfer Pump Inlet Valve and the AV-G01 Transfer Pump control switches to set them to Closed.
Close valves MV-C01 and MV-C03, then open valves MV-C02 and MV-D04.
Connect the MV-N02 line to the manual flush/purge port upstream from the pump.
Open MV-N02.
Flush/Purge
On the Manual Controls screen, toggle control switch AV-G01 Transfer Pump to Open to start the purge process.
When the purge sequence is complete, close MV-N02.
On the Manual Controls screen, toggle control switch AV-G01 Transfer Pump to Closed to start the drain process.
When the drain sequence is complete, close MV-D04, MV-C02, and MV-C01. 2
2, 6, 8 1
Note: The numbers in this Manual Controls screen figure indicate the controls referenced in the procedure’s numbered steps describing this screen.

33. Flush/Purge, continued
Manually Flushing the Dispense System
On the Manual Controls screen, press the Auto/Manual Dispense System button to place the Dispense System in Manual mode. See the figure below.
On the Manual Controls screen, press control switches AV-C04 Dispense Local Recirc, AV-G02 Dispense Pump, and AV-C02 Dispense Global Valve to toggle them to Closed.
Close valves MV-C04, MV-C08, and MV-C07, then open valves MV-C05 and MV-D01.
Connect the MV-W05 line to the manual flush/purge port upstream from the pump, then open MV-W05.
On the Manual Controls screen, toggle control switch AV-G02 Dispense Pump to Open to start the flush process.
Flush/Purge
2, 6, 8 2 2 1
On the Manual Controls screen, toggle control switch AV-G02 Dispense Pump to Open to start the flush.
When the flush sequence is complete, close MV-W05.
On the Manual Controls screen, toggle control switch AV-G02 Dispense Pump to Closed to start the drain process.
When the drain sequence is complete, close MV-D01 and MV-C05.
Note: The numbers in this Manual Controls screen figure indicate the controls referenced in the procedure’s numbered steps describing this screen.

34. Flush/Purge, continued
Manually Purging the Dispense System
On the Manual Controls screen, press the Auto/Manual Dispense System button to place the Dispense System in Manual mode. See the figure below.
On the Manual Controls screen, press control switches AV-C04 Dispense Local Recirc, AV-G02 Dispense Pump, and AV-C02 Dispense Global Valve to toggle them to Closed.
Close valves MV-C04, MV-C08, and MV-C07, then open valves MV-C05 and MV-D01.
Connect the MV-N02 line to the manual flush/purge port upstream from the pump, then open MV-N02.
On the Manual Controls screen, toggle control switch AV-G02 Dispense Pump to Open to start the purge process.
When the purge sequence is complete, close MV-N02.
Flush/Purge
2, 6, 8 2 2 1
Note: The numbers in this Manual Controls screen figure indicate the controls referenced in the procedure’s numbered steps describing this screen.
On the Manual Controls screen, toggle control switch AV-G02 Dispense Pump to Closed to start the drain process.
When the drain sequence is complete, close MV-D01 and MV-C05.

35. Sampling system chemistry exposes the operator to chemical hazards.
CAUTION
Chemical Hazard!
Sampling system chemistry exposes the operator to chemical hazards.
Wear the following PPE when taking samples:
Acid-resistant gloves
Chemical safety goggles and full-face shield
Protective clothing such as a lab coat, apron, or coveralls
Use an approved container to hold the sample.
Sampling

36. Sampling, continued
The system must be set in Manual mode and the cabinet doors must be opened to take a chemical sample.
The system shuts down automatically if the doors are opened. This safety feature can be bypassed during the sampling process and for other situations where you need to access the cabinet interior but do not want the system to shut down.
Press the Manual Controls tab at the top of the touch screen interface.
Press the Auto/Manual control mode button for the Dispense System to toggle the Dispense System to Manual mode.
Press the Door Bypass tab at the top of the touch screen interface.
Press the Door Bypass control switch to toggle it to Bypass.
Sampling
In Bypass Time, enter the number of minutes the door bypass is enabled.
The number of minutes remaining before the door bypass is disabled is shown in Bypass Time Remaining.

37. Sampling, continued
Open the cabinet doors to access the sampling valve and port.
Place the sample container, then release the sample valve and acquire the sample.
When the sample is complete, close the sample valve.
Remove the sample container and shut the cabinet doors.
In the Door Bypass tab, disable the door bypass by pressing the Door Bypass control switch to toggle it to Normal mode
Sampling

38. Module 4: Alarms
Module 4: Alarms

39. Alarm Types
Alarms are activated when a system interlock is tripped. There are three levels of alarms:
CRITICAL alarms are activated by urgent situations that require immediate attention and threaten the performance of the system.
A critical alarm sounds the audible annunciator and shuts down the system.
A chemical system shutdown (CSS) critical alarm stops the distribution pumping.
Alarm Types
PROCESS alarms are activated by situations that require immediate attention, but do not threaten the performance of the system.
An audible annunciator is sounded and the sequence of actions are paused.
Process alarms shut down the affected station.
WARNING alarms are activated by situations that do not threaten the performance of the system.
These situations do not require immediate attention, but they must be fixed before they escalate into a condition that could threaten the performance of the system.
A warning alarm sounds the audible annunciator.

40. (Ack All) Silence Alarms
Responding to Alarms
Press the Alarm tab at the top of the touch screen interface to display the active alarms list.
If needed, press the scroll bar to move through the alarm list. Acknowledge the alarm(s) by pressing the check mark icon (Ack All) Silence Alarms.
Read the alarm message and correct the problem. If the problem still exists, the alarm remains active and is written back to the list.
Responding to Alarms
(Ack All) Silence Alarms

41. Possible Causes & Solutions
Refer to the Alarms & Warnings chapter in the following Mega MPC25A-U Operations & Maintenance manuals for possible causes and solutions to alarm conditions for the specific Mega chemical dispense system.
Mega MPC25A-U, Model 101 Chemical Dispense System
Mega MPC25A-U, Model 102 Chemical Dispense System
Mega MPC25A-U, Model 103 Chemical Dispense System
Mega MPC25A-U, Model 104 Chemical Dispense System
Mega MPC25A-U, Model 105 Chemical Dispense System
Mega MPC25A-U, Model 106 Chemical Dispense System
Mega MPC25A-U, Model 107 Chemical Dispense System
Mega MPC25A-U, Model 108 Chemical Dispense System
Mega MPC25A-U, Model 109 Chemical Dispense System
Possible Causes/Solutions

42. Module 5: Maintenance
Module 5: Maintenance

43. Component Description
Valves
Check Valve
Component Description
Manual 3/4 inch Flare Valve
AOV 3-Way Valve
Manual M-Turn
Diaphragm Valve
Manual Ball Valve
Manual 2-Way Diaphragm Valve

44. Component Description, continued
Pumps
A pump dispenses chemical to the day tank and the global loop.
Each pump is equipped with a pulsation dampener to minimize pump output pressure fluctuations.
Component Description
Pressure Transducers
Measuring line pressure allows for obtaining valuable and critical diagnostic information, which is used for monitoring or controlling process conditions such as DI water and chemical dispense.

45. Component Description, continued
Ultrasonic Flowmeters
The ultrasonic flowmeter is designed for non-invasive precision flow measurements of high-purity fluids.
Two piezoelectric transducers mounted at both ends of the measuring path for the fluid stream generate and receive an ultrasonic wave that is analyzed to determine fluid velocity.
Component Description
Pressure Switches
Pressure switches notify the PLC when conditions meet or do not meet specifications and are associated with alarm conditions.
The digital pressure switch is generally used for communicating the system pressure (psi) and two pressure switch outputs.
Setpoints are adjustable from the front panel keys.

46. Component Description, continued
Level Sensors
Component Description
Proximity Sensor and Actuator
Liquid Level Sensor
The two-part magnetically operated proximity sensor delivers customer-defined sensitivity.
This sensor reads and monitors the liquid levels through clear tubing (transparent).
Side-Mounted Float Level Switch
The level switch has a polypropylene stem and float. The switch is mounted through the tank wall.

47. Setting Timers & Setpoints
System Timers
System timers are set from the Timers tab. Timer values should only be changed with permission.
Log on with the appropriate Maintenance credentials.
Press the Timers tab at the top of the touch screen interface.
Change the Setpoint timer value.
Setting Timers/Setpoints
Note: Pressing the Reset button resets the timer setpoint to its default value.

48. Setting Timers & Setpoints, continued
Process Setpoints
Process setpoints are defined in the Setpoints tab. Process setpoints should only be changed with permission.
Log in with the appropriate Maintenance credentials.
Press the Setpoints tab at the top of the touch screen interface to access the list of devices that have adjustable process setpoints.
Change one or more setpoint values for the desired device.
Setting Timers/Setpoints

49. Preventive Maintenance
Why is Preventive Maintenance Important?
Effective Preventive Maintenance (PM) maintains the system in optimal working order and ensures that the warranty extends to the equipment.
Preventive maintenance also helps prevent unexpected downtime and disruption of the transfer and distribution systems.
What Should I Consider Before?
Preventive Maintenance
Follow site specific procedures for notifying affected personnel before performing preventive maintenance.
Review all site requirements and procedures, including spill procedures, buddy systems, and PPE. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Review the site MSDS for each chemical used in the system.
Review all appropriate maintenance procedures.
Ensure all equipment is available, work permits are approved, and all affected personnel have been notified.
Before replacing any components, ensure the components are on hand.

50. Verifying Device Settings
Obtain the latest Device Reference List for the system. The device settings list can be found in the Mega system’s Operations & Maintenance manual.
Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS.
Locate each device in the Device Reference List and compare the actual setting with the recorded setting. Use the P&ID diagram in the Operations & Maintenance manual to aid in locating each device.
Record all deviations from the previously recorded settings on the Device Settings Record Sheet in the system’s Operations & Maintenance manual.
Consult with the Process Engineer to verify that deviations require correction.
Correct deviations, as required.
Verifying Device Settings

51. Checking Pump Operation
If the doors must be opened, wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in MSDS.
Ensure the pump is operating.
Record the pump operating pressure on the Preventive Maintenance List in the system’s Operations & Maintenance manual.
Reset the pump fault alarm.
Ensure the pump is correctly set open or closed. Typically, all pumps are open. Schedule maintenance for pumps that are not ready for operation.
Press the Timers tab at the top of the touch screen interface. Check the pump setpoint.
If the pump value exceeds the maintenance setpoint, verify the date of the last maintenance.
If the last maintenance was recent, ensure that the pump runtime was reset by pressing the timer’s Reset button.
Checking Pump Operation
If the run timer was not reset, consult a supervisor and reset the run timer upon approval.

52. Checking Leak Detectors
WARNING
Chemical Hazard!
Leak detectors are placed at the most likely spot to sense leaks. Chemical may be present. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information.
The leak detector LED should be green, indicating no leak. The corresponding input LED on the PLC should also be lit.
Spray a small amount of water on the leak detector with the hand sprayer. The LED should change to red, indicating a leak. The corresponding input LED on the PLC should turn off.
If the sensor does not change, test the wiring with another leak detector.
If the replacement sensor functions, the first sensor was faulty.
If the replacement sensor does not function, check leak detector wiring. Replace the leak detector or repair the wiring, if required.
Checking Leak Detectors

53. Checking & Replacing Fittings
Checking Fittings
Flared and threaded fittings can loosen due to system vibrations.
Teflon fittings should be hand-tightened to prevent the development of leaks.
Stainless steel fittings should be checked with a NO-GO gap gauge.
Inspecting the fittings requires opening the cabinet doors. Take the proper precautions to avoid chemical and electrical hazards.
Place the system in Manual mode and open all drain fittings to relieve all pressure from the chemical lines before replacing fittings.
WARNING
Electrical Hazard – Type 3!
Risk of exposure to hazardous electrical current. Use extreme caution during preventive maintenance procedures to avoid accidental contact with energized parts.
Checking Fittings
CAUTION
Pressure Hazard!
Relieve pressure in lines before loosening and replacing fittings.

54. Checking & Replacing Fittings, continued
Checking Fittings, continued
Ensure all fittings are tight.
Loose plastic fittings should be hand-tightened.
If the fitting leaks after it is tightened, replace it.
Avoid over-tightening fittings! Over-tightening fittings may strip the fitting threads.
Place the system in Automatic operation and check for leaks.
Checking Fittings

55. Checking & Replacing Fittings, continued
Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in MSDS.
Place the system into Manual operating mode.
Flush and purge the pipes in the area of the repair.
Vent the line pressure by opening valves to the drain or exhaust.
Close the closest isolation valves to isolate the fitting.
Lockout/tagout the isolation valves.
Remove the leaking fitting and the necessary plumbing.
Replace the leaking fitting and install removed plumbing.
Remove the lockout/tagout devices.
Open the isolation valves.
In Manual mode, fill the repaired area with liquid (or gas) and check for leaks.
If the fitting leaks, ensure the fitting is tight.
If the fitting still leaks, return to Step 3.
Checking Fittings

56. Cabinet Cleaning
Clean the cabinet after all other preventive maintenance procedures are completed.
Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in MSDS.
Rinse all chemical residue from the cabinet interior using the hand sprayers or wipes saturated in 10% IPA solution.
Thoroughly dry the cabinet interior.
Wipe the cabinet exterior clean.
Dispose of all wipes according to site requirements and MSDS recommendations.
Cabinet Cleaning