1. M. Oveissi, D. Eckard*, A. Rose+, B. Shneiderman+, G. W. Rubloff
Semiconductor Manufacturing Education and Training: Graphical User Interface (GUI) Design Issues
M. Oveissi, D. Eckard*, A. Rose+,
B. Shneiderman+, G. W. Rubloff
Institute for Systems Research and
+Human-Computer Interaction Laboratory
University of Maryland
Industrial Partners:
- CVC Products, Inc.
- Visual Solutions, Inc.
Supported by NSF (EEC )
* North Carolina State University
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2. Research Objective
To develop, demonstrate, and validate a new approach to semiconductor manufacturing education and training
realistic representation of time-dependent equipment and process behavior
dynamic simulation and visualization
active, hands-on learning experience
To assess and refine this approach for a broad range of student skills
manufacturing operators
undergraduate and graduate students
practicing engineers
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3. Design Issues Reusability Visualization GUI layout
DLL
GUI objects
Simulator objects
Visualization
2-D vs. 3-D
GUI layout
Virtual laboratory
Virtual classroom
HTML based information system
Lessons
Warnings and errors
Warning and error handling system
Simulator logic
HTML message generation
Dynamic parameter displays
Real-time changes
Wide dynamic range
Future
Lesson Builder
Learning Historian
...
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4. Dynamic Simulator for CVD System
CVD reactor
Central Wafer Handler
Load Lock
CVD reactor
Pressure
Pumps
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5. Compound Block Structure Second level Compound Block
Dynamic Simulator: mathematical hierarchy reflecting physics and chemistry
VisSim Window
of a Block-Diagram
Compound Block Structure
Simulator Features:
Reflect reality of chemistry & physics
Represent behavior of:
equipment
processes
sensor
control systems
Execute simulations in real-time:
1 sec (simul) = 1 sec actual
response to learner actions is realistic
Second level Compound Block
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6. Evolution of Cluster Tool GUI
2-D
Simulator
engine
as GUI
SIH4 N2
3-D
Initial GUI for
education and
training
Current GUI for
education and
training
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7. Simulator Module Architecture
VisSim simulator,
running CVD
system model
.dll
Software
Link
Visual Basic / Delphi
graphical user interface
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8. Three Distinct Development Environments
Cluster GUI
Nile GUI
Pump System GUI
GUI
.DLL
.DLL
.DLL
DLL
(general.dll)
Simulator
Cluster Simulator
Nile Simulator
Pump System Simulator
Same architecture and DLL used for different projects -
semiconductor processing, hydrology, and vacuum technology
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9. GUI Layout in a Learning Environment
Virtual Laboratory (cluster tool system
accessible to learner)
Virtual Classroom (HTML load lock description)
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10. Warning and Error Messages
Simulator structure designed to trap warning and error conditions
Generate error code number from simulator
Transfer error code number through DLL to GUI
Display HTML warning/error message page appropriate to predefined warning/error condition
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11. Warning and Error Messages.
Warning and Error Messages
Problem: You are trying to pump out and vent the L/L chamber at the same time.
Principles:
Venting and pumping the L/L are conflicting.
Venting fills the chamber with gas, while pumping removes the gas, thus
wasting gas. Do one or the other at a time.
The pump gate valve and vent valve should
not be open simultaneously!
Example
Resume
Help
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12. Dynamic Parameter Displays
2.1 -5
E-5
2.1*10-5
Pointer with range bar
From Visual Basic
From VisSim Simulator
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13. Simulator Module Evolution
Simulator Engine
Physically focussed
Continuously improved
Increasing
Physical
Sophistication
of Engine
Simulator Engine
Physically focussed
Continuously improved
Simulator Engine
Physically focussed
Continuously improved
Learner Interface
NOVICE OPERATOR
User focussed
Multiple versions
Learner Interface
SEASONED OPERATOR
User focussed
Multiple versions
Flexible
Software
Link
Learner Interface
NEW ENGINEER
User focussed
Multiple versions
Learner Interface
EXPERT ENGINEER
User focussed
Multiple versions
Increasing
User Skills
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14. SUMMARY
Dynamic software simulators enable real-time, hands-on experiences for active learning
based on physical reality
responding in real time frames
Enhanced visualization and animation through GUI’s further facilitate learning
Commercial software platforms enable the required software integration
Visual Basic/C++ <==> DLL <==> VisSim simulator
Separation of “operator screen” from “simulator engine”
permits independent improvements in each
enables the learner to progress through a sequence of experiences with increasingly sophisticated screens and material
Modularization
provides independencies
provides reusability
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