1. ITRS AMC Roadmap Project Plan : AMC Integrated Concept
ITRS / WECC /TWG AMC/crosscut issue FI
First proposal : Spring meeting April-2010
Follow up with FI May

2. Outline Problem statement
Changes/additions in Red Bold
Problem statement
Current Situation....problems, examples of AMC issues
exeprienced by waferfab
First assumptions from ITRS AMC
Project coordination with FI
Next steps
Others: waste reduction matrix

3. AMC Integrated Concept

4. Problem statement
Foup could act as contamination reservoir and distributor for
contamination ; Foup = Fab interface for:
- AMHS
Tools; loadports
Minienvironment
Wafer surfaces with different outgassing potential and interactions to other
surfaces -
Foup characterization and monitoring becomes more important
New approach: Introduction of new foup materials (FM4911)
Lack of standards/methods for defining Foup – and Foup cross contamination (SEMI)
- High costs for non standardized tests @ IDMs

5. Status and proposal for next steps
Description of different interactions /interfaces between Foup and environment
Defining of reliable monitoring methods for chemical compounds
in regards to YE7 table
-Literature research; collecting most detrimental effects and compounds
-Implementation of particle cleanliness requested ?
Methods to be tested / proofed (eg . ISMI project ?)
Project coordination with FI;contribution of FI
-First meeting held March
-Input received from FI- refer to meeting minutes from Patrick
-Team formation i

6. Goal
Definition of interfaces and monitoring strategy in regards to Foup:
Introduction of acceptance criteria in ITRS table ( YE; YE7)
Introduction of extra line for „Foup environment“ in ITRS table YE7
Definition of Potential solutions and countermeasures-eg.:
( needs to be discussed with FI )
-Cleaning methods
-Purging options
-Degas chambers
-Addressing development of improved Foup materials ( non-absorbing)
Development first draft for method description; time line in dependency of discussion /outcome with FI i

7. Define working group /Team Member
WECC / AMC:
Christoph Hocke- INFINEON
Arnaud Favre – ADIXEN
Andreas Neuber – AMAT
Michael Otto - FHG
Astrid Gettel - Globalfoundries
FI:
Will follow soon i

8. First proposal: Description of Interactions: Foup < - > wafer
A.Favre

9. First proposal: Description of Interactions: Foup < - > wafer
A.Favre

10. First proposal: Description of Interactions: Cleanroom air -> Foup
Proposal TWG AMC:
Chr.Hocke/INF

11. First proposal: Description of Interactions: Cleanroom air -> Foup
Proposal TWG AMC:
Chr.Hocke/INF

12. First proposal: Description of Interactions: Cleanroom air <-> wafer inside Foup
Proposal TWG AMC:
Chr.Hocke/INF

13. First proposal: Description of Interactions: Memory effects (based on Foup material)
Proposal TWG AMC:
Chr.Hocke/INF

14. Collection of measuring methods = f {compounds, wafer/or foup based etc….}
Proposal TWG AMC:
M.Otto/FHG

15. Input FI from first meeting 03/09/10

16. Input FI from first meeting 03/09/10

17. Input FI from first meeting 03/09/10
Get packet packet together to send to the wafer fabs….
Get a list of waferfab….to poll
Get participation
Get data
Bottleneck….get some university…neutral participation…..
….get more inform from the ye group….
Next Steps:
Arnaud, Christopoh, and Patrick…make an input to the pack…
Next meeting 2-3 weeks….

18. Backup

19. Project plan: AMC (Integrated) Concept
Proposal TWG AMC:
Interactions
Contermeasures
Fresh processed wafer <-> FOUP
- outgassing fresh processed wafers
-> degas chamber; tool supplier
tool supplier ; FI
- Loadlock? Purge FI
b) FOUP <-> wafer
- fresh FOUP
- as-used-FOUP
- cleaned FOUP
Carrier supplier : Deployment of nonabsorbing materials –no interactions wafer –carrier material
c) FOUP <-> ambient Cleanroom
d) ?
ambient cleanroom
MENV/Filter
FOUP
Tool environment
for processing wafer LP
FOUP

20. AMC Integrated Concept : Different interactions / interfaces

21. Project plan:AMC(Integrated) Concept
v. good
Focus area

22. Next steps 2. Collection of different measuring methods = f
- Chemical species in acc. to YE9 table
- Online /offline method
- Detection limit
- Referring to Literature ……?!
Next steps:
- Justification/Evaluation of methods
- Concentration only on already known detrimental chemical
compounds ( too much datas); needs to be defined