Home Module 1: Safety Module 2: System Overview

Home Module 1: Safety Module 2: System Overview
Module 3: System Operation Module 4: Alarms Module 5: Maintenance

Module 1: Safety Module 1: Safety

Safety Rules Before operating any Mega Fluid Systems, Inc. equipment, follow these safety rules: Safety Rules Maintain compliance with all local, state, and federal regulations, ordinances, laws, etc., that require handling all processing solutions, chemicals, and acids, as well as all wastes produced by this system. All personnel must have proper training in related safety procedures. Do not allow unauthorized or untrained personnel in the area of the system. Personal Protective Equipment (PPE) is required. Follow requirements listed in the MSDS for the appropriate chemical. Follow all site specific rules for PPE. Treat all chemical exposures as potentially serious. Neutralize and irrigate the exposed area and seek first aid immediately as outlined in the MSDS. Use extreme caution when working with electrical equipment. Always assume high voltage exists; use lockout and tagout procedures during maintenance. Treat all chemical spills or leaks as hazardous and clean up immediately.

Safety Features Emergency Machine Off (EMO) Door Interlocks
The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the tool. Safety Features Door Interlocks Opening an interlocked door triggers an alarm (unless the interlock bypass is activated) To prevent disrupting chemical/slurry dispense, bypass interlocked doors before opening (as needed; return to normal operating mode as soon as possible) Leak Detectors Stops the tool and activates a critical alarm

Safety Hazards & Symbols
Pay attention to system labeling! Safety Hazards & Symbols DANGER Pick one (until you’ve picked all 3) WARNING CAUTION

Pay attention to system labeling! Safety Hazards & Symbols DANGER DANGER indicates a hazardous situation which, if not avoided, WILL result in death or serious injury. WARNING CAUTION

Pay attention to system labeling! Safety Hazards & Symbols DANGER WARNING indicates a potentially hazardous situation which, if not avoided, COULD result in death or serious injury. WARNING CAUTION

Pay attention to system labeling! Safety Hazards & Symbols DANGER CAUTION indicates a potentially hazardous situation which, if not avoided, may result in minor or moderate injuries. WARNING CAUTION

Lockout/Tagout Bleed off the pressure or flush all lines carrying hazardous chemicals. Turn off or return all operating controls to the neutral mode. Relieve, disconnect, restrain, or otherwise render safe residual or stored energy such as capacitors, gas, steam, water pressure, air, and hydraulic. Lockout/Tagout Place the AC Disconnect switch in the Off position. Place and lock a padlock on the disconnect switch. Attach a lockout tag to the switch which indicates the system is locked out for service purposes and identifies those employees authorized to remove the lock and tag. Test the valve or switch to ensure the control cannot be moved to the activated position. Ensure all energy sources have been de-energized on dual or multi-energy source operations prior to beginning work. Re-test the controls of the individual machine or equipment to verify the operation is positively off.

Lockout/Tagout, continued
Removing Lockout/Tagout Inspect the machine or equipment to ensure all components, including safeguards, are in place and personnel are in the clear before reactivation. Lockout/Tagout Remove the padlock and notify the affected employee(s) when work is complete and the machine or equipment is ready to be reactivated. CDA lockout valve N2 lockout valve DI water isolation valve (inside upper right compartment, left side of tool)

EMO button must be accessible!
Emergency Off (EMO) The EMO provides the means to immediately shut down the tool. Pressing the EMO immediately interrupts system power and stops all functions of the system. CAUTION EMO button must be accessible! Never disable or cover an EMO button. This can prevent the system from being stopped in the event of an emergency. Emergency Off (EMO) Pressing the EMO button is not a safe alternative to the prescribed lockout/tagout procedure.

Key Failure Points Changing out an empty supply drum, tote, or carboy
The following procedures (but not limited to) may place you at risk of chemical exposure: Changing out an empty supply drum, tote, or carboy Sampling system chemical Flushing the system Checking for leaks Performing a particle count Transporting chemicals to the system Filling the pipes with air Changing pumps, valves, filters, pressure switches, etc. Handling PPE after use Key Failure Points

Spill Mitigation Mega systems are designed to minimize the possibility of an unwanted chemical release. The cabinet is designed to contain 110% of the total piping volume plus the total contents of the largest reservoir. If a spill should happen: Treat all chemical spills as extremely hazardous. Notify the proper site authority. Follow all site specific rules for chemical spills. Follow all information contained in the MSDS. If possible, contain the spill with absorbent barriers. If possible, neutralize the spill according to the MSDS. Spill Mitigation

Solid Waste Disposal Potential Solid Waste Disposal Method
As with all chemicals, refer to the MSDS for disposal considerations. The following lists the potential solid waste materials created during the operation and maintenance of the Mega MB321-LCU Model 100 system. Raw chemical carboys Sample bottles/beakers Filter elements, and Various parts during service or replacement. Solid Waste Disposal Disposal Method Consult local regulations for guidance on disposal. Incineration at a facility with appropriate permits or authorizations is the recommended method of disposal. Container Disposal Empty contains retain product residue. Observe all hazard precautions. Keep away from heat, sparks, and flames. Do not distribute, make available, or reuse empty containers except for storage and shipment of original product. Remove all hazardous product residue, and puncture or otherwise destroy empty containers before disposal.

Module 2: System Overview

System Overview The Mega MB321-LCU Mobile Blending System, Model 100 is an automated chemical blend/distribution unit which dynamically blends chemical from up to two carboys with DI water from a house supply line. This in-line blending system is used to maintain specified levels in the distribution tank. An automated filter system filters chemical before it is supplied to the global loop. This filter system is capable of automatic swapping of filter banks due to high differential pressure, as well as auto flush/purging before filter element removal. System Overview

Sequence of Operations Overview
Dynamic Blending LFC W01E DI Water Supply LFC AV Q02 AV D03 AV W01E Sequence of Operations AV W02E Calibration Port Process Drain Static Mixer #1 Static Mixer #2 AV D02A AV D02B Tank If the carboy runs empty, the chemical feed loop will auto swap to the standby loop and signal the operator to replace the empty carboy. When blend is requested, the addition line is opened during blending and returns to the recirculation state when finished. Chemical is continually recirculated back to the carboy in order to maintain steady flow through the metering pump until a blend is requested. Chemical and DI water meet in the blend plenum before flowing through two static mixers and on to the Distribution tank. The raw chemical feed system consists of two chemical feed loops, each containing a raw chemical carboy, a high accuracy metering pump, a recirculation line, and blend addition line. The metering pumps draw chemical from the carboy and dispense at a steady flow rate, while the flow controller allows DI water to be added determined by the current recipe. The blend function is triggered by a tank low-level state set by the level sensor or the tank scale. Blending continues until the tank high-level setting is reached. One loop acts as the primary blend addition line, while the other is in standby. Drain Drain AV C01A AV C01B AV C02A P-C01A AV C02B P-C01B YS C01A YS C01B Next Page Press to Start Animation Start Animation Click… Online Standby

Sequence of Operations Overview, continued
Tank Recirculation and Dispense Process Drain Sample Port Global Return Global Supply AV F02 Sample Door Sequence of Operations AV D01 Closed AV Q01 AV B04 Filter Bypassed Blending AV B03 Global Loop AV CB13 The distribution loop has two pumps operating in series; one acts as the primary pump the other in standby. If a pump fails or a swap timer occurs, the active pump swaps to the standby pump. Global loop pressure and flow is controlled by a combination of a supply flow meter, pump feedback, and a manual back-pressure regulator on the global loop return. After the batch has been qualified, material is pumped to the global loop. Once blended chemical has filled the tank to the required minimum level, the contents can be recirculated locally for a given period and metrology is used to qualify the batch. YS B12 LSHH B01 LSH B02 LSF B03 LSL B04 Local Loop AV B02A YS B01 AV N01 AV E01A AV B01A P-B01A Click… Start Animation Press Start Animation Next Page N2 DI AV B02B AV W02 AV E01B Process Drain AV D02 AV B01B P-B01B

Sequence of Operations Overview, continued
Filtration To Global Loop Tank Supply DI AV N01A AV D07A AV D08A Sequence of Operations YS D05A AV W01A AV F04A N2 Drain Drain AV F03A AV D01A AV D03A AV D04A AV Q01A The standby filter bank is first isolated and nitrogen is charged into the filter bank cavity at a pressure slightly lower than the pressure of the online bank. Material dispensed from the main system is pumped through a single filter on a single bank prior to reaching the global loop. The filter switching function brings the standby filter bank on line and fills it with material to bring the online filter bank offline for servicing. Pressure transducers monitor pressure across the filters. If a pressure drop exceeds the filter change-out setpoint, the filter bank switching function is initiated. The distribution filter subsystem is a dual filter, dual bank filtration process that provides single-staged filtration to the global loop, with a redundant bank as backup. At a set time to ensure evacuation of all nitrogen from the lines, the standby filter bank discharge isolation valve is opened and the offline filter bank is isolated from the discharge path. Next, drain valves are opened and the inlet isolation valve to the bank opens to fill the void spaces in the filter bank with material, and push out the purge nitrogen. Drain Drain Sample AV F02 DI AV N01B AV D07B AV D08B YS D05B AV W01B AV F04B N2 Drain Drain Start Animation Press Start Animation Click… Next Page AV F03B AV D01B AV D03B AV D04B AV Q01B Drain Drain Sample

Module 3: System Operation

HMI Overview Touch Screen Graphics Click to view touch screen items
Dynamic Blender LFC Pump Automatic Valves HMI Overview Popup Menu Carboy Process Data

System Startup The system is initially set up and powered on by an operator or engineer with an administrative password. However, a restart is required after a power outage. Refer to Restarting after EMO if restarting the system. System Startup Ensure the drain pump is connected. 2. Toggle the AC Disconnect switch to the On position. 3. Ensure the EMO is disengaged (pulled out). 4. Press the green Start button on the front of the Controls cabinet. The system begins the startup procedure. The programmable logic controller (PLC) initializes and begin its first scan. When the setup is complete, the Main Menu is displayed on the touch screen.

System Login Password Permissions
The user password authorizes the user to view and/or edit various controls in the system. The touch screen interface is set up with the following permission levels: System Login Default - enables an operator to view all screens in the system. Mega - enables the operator to start and stop the process, take samples, calibrate LFCs, and other similar tasks. Maintenance - enables the operator with additional permissions to manually open and close valves, and access the Maintenance screen. Engineer - enables all access, including changing setpoints and alarm severity.

System Login, continued
From the Main Menu, press the Login button. The Login screen appears. Press the User button and type the user name, then press Enter. Press the Password button and type the password, then press Enter. Press Enter on the Login screen to submit the credentials. If the user name or password are not recognized then the user login status remains as DEFAULT. System Login

Restarting after an EMO
If the system shuts down while running an operation, it does not continue where it left off after the restart. If the system shuts down due to… then… the EMO switch being pressed, twist the EMO button out the exhaust interlock, check the exhaust system for proper operation. check the exhaust high and low pressure setpoints. door interlocks verify all doors are closed. Restarting after EMO Restart the system following the procedure outlined in System Startup. If the system has been inactive with chemical in the lines for an extended period of time, it may be desirable to manually flush the filters.

Automatic Operation To place the system in Automatic mode:
From the Main Menu, press the Maintenance button. Toggle System Control toggle switch to Auto. Toggle one Carboy Control to Online; the other will remain in Standby mode. Toggle the LFC Control to Online. Toggle one Dispense Pump control to Online; the other will remain in Standby mode. Automatic Operation

WARNING NOTICE Replacing the Carboys Before you Begin Chemical Hazard!
Follow ALL safety requirements for handling PlanarClean AG 3300 chemicals. Read the manual before performing this task! WARNING Chemical Hazard! Performing maintenance on the key failure points may expose the operator to hazardous chemicals. Wear proper PPE to protect against eye, upper respiratory, and skin irritants from PlanarClean AG Refer to MSDS for site-specific chemical information. Replacing the Carboys NOTICE Door opening = System shutdown! Opening any cabinet door will cause the system to shut down immediately.

Replacing the Carboys Removing the Carboy
Obtain and wear the required PPE. Refer to local MSDS for requirements. Turn the door bypass key switch to the Bypass position. A red light will display indicating the door bypass is active, and an alarm will occur (if the alarm is enabled). On the HMI, a yellow Bypass indicator will display. Open the cabinet door for the carboy you wish to remove. Unscrew and remove the 3 lines entering the carboy lid. Unscrew the carboy lid and remove the lid and dip tube. Place a lid on the carboy to seal any remaining chemical. Move the appropriate sized cart next to the carboy cabinet door opening. Lift the carboy out of the cabinet and place in the appropriate site location. Remove PPE and dispose according to site regulations and MSDS requirements. Replacing the Carboys

Replacing the Carboys Installing the Carboy
Obtain and wear the required PPE. Refer to local MSDS for requirements. Place a new/full carboy on an appropriate sized cart and move it next to the carboy cabinet door opening. Slide the carboy into position on the cabinet carboy platform. Carefully unscrew the lid of the carboy. Insert the dip tubes and screw the lid onto the carboy. Attach all 3 lines to the carboy lid. Close the cabinet door. Turn the door bypass key switch to the Interlock position. The door interlocks are now active. Remove PPE and dispose according to site regulations and MSDS requirements. Replacing the Carboys

Responding to Alarms Alarms are activated when a system interlock is tripped. If an alarm is activated, press the Active Alarms button on the Main Menu, or by pressing the Alarms button on other screens. Press the up or down scroll button to scroll through the alarms list and highlight the activated alarm. Press the Silence button to silence the audible alarm, then press the Ack button to acknowledge the alarm. Read the alarm message and correct the problem. Once the alarm condition is resolved, press the Reset button to reset the alarm. If the alarm condition still exists, the alarm is reactivated. Responding to Alarms

Door opening = System shutdown!
Door Interlock Bypass The cabinet doors labeled with the interlock stickers are wired in the EMO circuit. Opening these doors during normal operation cause the system to shut down immediately. WARNING Chemical Hazard! Performing maintenance on the key failure points may expose the operator to hazardous chemicals. Wear proper PPE to protect against eye, upper respiratory, and skin irritants from PlanarClean AG Refer to MSDS for site-specific chemical information. Door Interlock Bypass NOTICE Door opening = System shutdown! Opening any cabinet door will cause the system to shut down immediately.

Door Interlock Bypass, continued
Door Interlock Bypass On Turn the door bypass key switch to the Bypass position. A red light will display indicating the door bypass is active, and an alarm will occur. On the HMI, a yellow Bypass indicator will display. Door Interlock Bypass Off Verify all doors are closed. Turn the door bypass key switch to the Interlock position. Open the Active Alarms screen and press the Reset button to deactivate the alarm. Door Interlock Bypass

Recipes Selecting a Recipe
With the correct login credentials, recipes can be viewed and selected when the system is in Auto mode. From the Maintenance screen, press the Recipe button. Scroll through the recipe options by pressing the right or left arrow buttons. If the correct recipe is available, press the MAKE THIS RECIPE ACTIVE button, then click the Close button. Recipes

Recipes, continued Editing a Recipe
Up to 10 recipes can be stored in the system. From the Recipe dialog, press the Recipe Edit button. Scroll through the recipe options by pressing the right or left arrow buttons to find a recipe with the correct chemical ratio. Press a value in the New field to display the numeric keypad, then enter a new DI Water Ratio value; this creates a new chemical to DI water ratio recipe. Press the Save button to save the new recipe. Press the Close button to close the Recipe Edit dialog. Recipes

LFC Calibration/Verification
The LFC Flow Calibration & Flow Verification dialog is used to calibrate the liquid flow controllers, and verify the flow dispense volume and dispense time. This dialog is only available when in Auto mode, and with the LFC Control toggled to Calibration mode in the Maintenance screen. LFC Calib./Verification

LFC Calibration/Verification, continued
LFC Flow Calibration WARNING Chemical Hazard! Performing maintenance on the key failure points may expose the operator to hazardous chemicals. Wear proper PPE to protect against eye, upper respiratory, and skin irritants from PlanarClean AG Refer to MSDS for site-specific chemical information. Press the Start Calibration button to start the LFC Flow Calibration steps. Flood the line. Press the Lines Are Flooded button to start the LFC flow calibration. Place the beaker in the sample compartment. Press the Beaker is in Place button. Press the Take Sample button to start the flow. When it’s full, press the Next Step (Stop Flow) button to stop the flow and move to the next step. Enter the measured beaker volume in milliliters in the Beaker field. Press the Accept Volume button. Repeat Step 3 through Step 7. The calibration steps are repeated 4 more times (5 total). After the fifth calibration cycle, press the Accept Calibration button. Do not remove PPE and continue with LFC Flow Verification steps. LFC Calib./Verification

LFC Calibration/Verification
LFC Flow Verification Press the Start Verify button to start the LFC Flow Verification steps. Configure the flow verification settings. Enter the volume (in milliliters) requested from the LFC. Enter the flow rate in milliliters per minute. Press the Lines Are Flooded button when you see a steady flow. Place the beaker in the sample compartment. Press the Beaker is in Place button. The LFC begins flowing. Volume Dispensed and Dispense Time indicates the actual LFC flow volume and time. Remove the beaker and cap the calibration port, then press the Verified button. Press the Close button to close the dialog. Remove PPE and dispose according to site regulations and MSDS requirements. LFC Calib./Verification

Obtain Appropriate Authorization!
Flush/Purge Batch Abort A manual abort sequence may be necessary if process parameters are out of specification range or if the batch becomes contaminated. A Flush/Purge is used to drain and flush the tank, and when a thorough cleaning is necessary. A gravity drain dumps the entire tank contents to the drain, leaving residual fluid in the process piping. NOTICE Obtain Appropriate Authorization! Batch Abort dumps the tank contents to the drain. Obtain authorization before proceeding with a Flush/Purge. Flush/Purge

Flush/Purge, continued
Press Login to log in with the appropriate maintenance credentials (if not logged in already). From the Main Menu, press any screen button to access the screen. Press the Home button, and select Sample & Flush Purge from the pop-up menu. Select the desired Flush/Purge button to open the System Control (Flush/Purge) dialog. Flush/Purge

5. Select the type of manual-abort sequence you want to perform: Gravity drain only Complete flush/purge Reset flush/purge NOTICE ENSURE QUALITY BATCH BEFORE RUNNING RESET FLUSH/PURGE! Run a Complete Flush/Purge to ensure a high-quality batch before running Reset Flush/Purge Flush/Purge

6. Based on the abort sequence chosen, select the action you prefer to perform at the end of the abort sequence. If you choose… Your choices are… Gravity Drain Only Put station in Manual Start a new batch Complete Flush/Purge Reset Flush/Purge Put station in local recirculation 7. Press the Execute button to start the Abort (Flush/Purge) sequence. Flush/Purge

Sampling system chemistry exposes the operator to chemical hazards.
CAUTION Chemical Hazard! Sampling system chemistry exposes the operator to chemical hazards. Wear the following PPE when taking samples: Acid-resistant gloves Chemical safety goggles and full-face shield Protective clothing such as a lab coat, apron, or coveralls Sealable container approved for use with this chemical. Sampling

WARNING Sampling, continued Chemical Hazard!
Performing maintenance on the key failure points may expose the operator to hazardous chemicals. Wear proper PPE to protect against eye, upper respiratory, and skin irritants from PlanarClean AG Refer to MSDS for site-specific chemical information. Enable the door bypass keyswitch so the doors can be opened without losing system power. Open the sample door. Place the open sample container into the sample cabinet. Open the sample needle valve, then close the sample door. Sampling

Sampling, continued From the Home popup menu, press the Samples & Flush/Purge button to display the Maintenance screen. Press the desired sample button. A screen appears with instructions for starting the sample process and acquiring the sample. Press the Start Sampling button. When the sample bottle is full, press the Done Taking Sample button. Sampling

Sampling, continued Next Up: Alarms!
Remove the filled sample container and secure the lid or seal the container. Close the sample needle valve, then rinse any spilled chemical to the drain. Close the sample door. Disable the door bypass key switch. Remove PPE and dispose according to site regulations and MSDS requirements. Next Up: Alarms! Sampling

Module 4: Alarms Module 4: Alarms

Alarm Types Alarms are activated when a system interlock is tripped.
CRITICAL alarms are activated by urgent situations that require immediate attention and threaten the performance of the system. A critical alarm sounds the audible annunciator and shuts down the system. A chemical system shutdown (CSS) critical alarm stops the distribution pumping. Alarm Types PROCESS alarms are activated by situations that require immediate attention, but do not threaten the performance of the system. An audible annunciator is sounded and the sequence of actions are paused. Process Alarms shut down the affected station. WARNING are activated by those situations that do not need immediate attention, but could escalate into a more serious problem if ignored.

Responding to Alarms The alarms have three states: active, acknowledged, and reset. An active alarm indicates the interlock is currently tripped but has not been acknowledged. The audible annunciator sounds when active alarms exist. Responding to Alarms When an operator presses the Acknowledge key, the audible annunciator turns off and the alarm is lowered to the acknowledged state. When the operator presses the Reset key, the alarm is reset. If the condition which caused the interlock has not been corrected, the alarm is reactivated. The alarm status is viewed from the light tower located on the front of the system.

Safety Indicator Light
The safety indicator light simply indicates the current alarm state. Color State Green No alarm Yellow Warning alarm Red flashing Process alarm Red solid Critical alarm Safety Indicator Light

Possible Causes & Solutions
Refer to the Alarms & Warnings chapter in the manual for possible causes and resolutions to alarm conditions. Possible Causes/Solutions

Module 5: Maintenance Module 5: Maintenance

Component Description
Valves Manual Valves Check Valve Component Description Manual Valve Automatic Valve Automatic Valve Swagelok Relief Valve

Component Description, continued
Pressure Transducer Component Description Measuring line pressure allows for obtaining valuable and critical diagnostic information, which is used for monitoring or controlling process conditions such as DI water and chemical dispense. Pressure Transducer

Regulators Flow Regulator Flow regulators consist of a solid float inside a tapered vertical tube that widens at the top. Fluid enters at the base of the tube, causing the float to rise. The upward or downward movement of the float corresponds to the rate of fluid flow in the tube. A rotameter consists of a tapered tube with a float inside that is pushed up by flow and pulled down by gravity. At a higher flow rate the float rises. The float is shaped so it rotates axially as the fluid passes. Rotameter Component Description Reducing Regulators Reducing regulators control the incoming pressure to an exact pressure no matter what happens to the incoming pressure. The regulator design is based on a diaphragm and needle through a hole principle. The diaphragm moves to compensate for any changes in incoming N2 pressure.

Pressure Switches Pressure switches notify the PLC when conditions meet or do not meet specifications and are associated with alarm conditions. The digital pressure switch is generally used for communicating the system pressure (psi) and two pressure switch outputs. Setpoints are adjustable from the front panel keys. Component Description Level Sensors Liquid Level Sensor Able to read and monitor the liquids levels through clear tubing (transparent). Turck Level Sensor Able to read and monitor the liquids levels through the walls of the tank (not transparent).

Tank Tanks are used to distribute slurry to the Global Loop. Component Description

Filters Filters catch large particles being pumped through systems. An indication of clogged filters is an increase in differential pressure. Component Description

Setting Timers & Setpoints
The system setpoints can be changed and reset from the Setpoints screen. This screen lists the process, flush/purge, and alarm setpoints for the system components. From the Maintenance screen, press the Setpoints button to display the Setpoints screen. Press the desired station or filter button, then press its process or function button that provides the setpoint to edit. Enter or edit the value in the Setpoint field. Setting Timers/Setpoints

Preventive Maintenance
Why is Preventive Maintenance Important? Effective Preventive Maintenance (PM) maintains the system in optimal working order and ensures that the warranty extends to the equipment. Preventive maintenance also helps prevent unexpected downtime and disruption of the blend and distribution system. What Should I Consider Before? Before performing system preventive maintenance: Preventive Maintenance Follow site specific procedures for notifying affected personnel before performing preventive maintenance. Review all site requirements and procedures, including spill procedures, buddy systems, and PPE. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Review site MSDS for each chemical used in the system. Review all appropriate maintenance procedures. Ensure all equipment is available, work permits are approved, and all affected personnel have been notified. Before replacing any components, ensure the components are on hand.

Verifying Device Settings
WARNING Chemical Hazard! Performing maintenance on the key failure points may expose the operator to hazardous chemicals. Wear proper PPE to protect against eye, upper respiratory, and skin irritants from PlanarClean AG Refer to MSDS for site-specific chemical information. Obtain the latest device settings list for the system. Verifying Device Settings Locate each device on the Device Settings List, and compare the actual setting with the recorded setting. Use the P&ID to aid in locating each device. Record all deviations from the previously recorded settings on the Device Settings Record Sheet. Consult with the Process Engineer to verify that deviations require correction. Correct deviations, as required.

WARNING Changing Filters Chemical Hazard!
Filters catch large particles being pumped through systems. An indication of clogged filters is an increase in differential pressure. Mykrolis’ Chemlock filter cartridges are locked into the bowl with a 1/4-turn. For filter cartridge removal, do not grab the filter cartridge body, simply unscrew the locking ring and the filter cartridge will disengage from the housing head. WARNING Chemical Hazard! The exhaust effluent may contain chemical (vapor or liquid). Handle and treat to comply with safety and pollution control regulations. Supplemental exhaust may be required for maintenance tasks. Refer to the site MSDS for chemical-specific information. Changing Filters

Changing Filters, continued
Wear the proper PPE. Refer to the MSDSs and site regulations. Ensure the filter bank has been taken off line and the manual drain valve has been opened to release all cartridge and bowl contents. Note: Filters are mounted with the bowl up on slurry systems and with the bowl down on chemical systems. Unscrew the locking ring and the filter cartridge will disengage from the housing head. Remove the filter cartridge and discard according to MSDS and site regulations. Insert the filter cartridge into the bowl. Twist the filter cartridge 1/4-turn to lock. Changing Filters Attach the bowl to the head. Tighten the locking ring to seat the double O-rings. Use a housing wrench to ensure proper tightening. Insert Attach Twist Tighten

Checking Pump Operation
If the doors must be opened, wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Ensure the pump is operating. Record the pump operating pressure on the Preventive Maintenance List. Force a pump switchover for redundant pumps by closing the manual valve downstream of the pressure switch. Ensure that pump 1 faults and pump 2 begins operation. Reset the pump fault alarm. Ensure the pump is correctly set online or offline. Typically, all pumps are online. Schedule maintenance for pumps that are not ready for operation. Record the pump runtime from the Timers Setpoint screen. If the pump value exceeds the maintenance setpoint, verify the date of the last maintenance completed. If the last maintenance was recent, ensure that the runtime was reset. If the run timer was not reset, consult a supervisor and reset the run timer upon approval Checking Pump Operation Levitronix BPS-600 Pump Grundfos DDA Pump Yamada DP-5 Sump Pump

Checking Leak Detectors
WARNING Chemical Hazard! Leak detectors are placed at the most likely spot to sense leaks. Chemical may be present. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Refer to the site MSDS for chemical-specific information. Leak detectors are a 24 VDC, Teflon-coated, paperless sensor. They are wired in a fail- safe configuration. The leak detector should be correctly placed in the mounting bracket. Malfunction can occur due to bad wiring or it can stick. If malfunction occurs, replace the leak detector or repair the wiring, if required. Checking Leak Detectors

Checking and Replacing Fittings
Checking Fittings Flared and threaded fittings can loosen due to system vibrations. Teflon fittings should be hand-tightened to prevent the development of leaks. Stainless steel fittings should be checked with a NO-GO gap gauge. Inspecting the fittings requires opening the cabinet doors. Take the proper precautions to avoid chemical and electrical hazards. Place the system in Manual mode and open all drain fittings to relieve all pressure from the chemical lines before replacing fittings. WARNING Electrical Hazard – Type 3! Risk of exposure to hazardous electrical current. Use extreme caution during preventive maintenance procedures to avoid accidental contact with energized parts. Checking Fittings CAUTION Pressure Hazard! Relieve pressure in lines before loosening and replacing fittings.

Checking and Replacing Fittings, continued
Checking Fittings, continued WARNING Chemical Hazard! Performing maintenance on the key failure points may expose the operator to hazardous chemicals. Wear proper PPE to protect against eye, upper respiratory, and skin irritants from PlanarClean AG Refer to MSDS for site-specific chemical information. Ensure all fittings are tight. Loose plastic fittings should be hand-tightened. Stainless steel fittings should be checked with a NO-GO gap gauge. If the fitting leaks after it is tightened, replace it. Avoid over-tightening fittings! Over-tightening fittings may strip the fitting threads. Place the system in Automatic operation and check for leaks. Checking Fittings

Checking and Replacing Fittings, continued
Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Place the system into Manual operating mode. Flush and purge the pipes in the area of the repair. Vent the line pressure by opening valves to the drain or exhaust. Close the closest isolation valves in order to isolate the fitting. Lockout/tagout the isolation valves. Remove the leaking fitting and the necessary plumbing. Replace the leaking fitting and install removed plumbing. Remove the lockout/tagout devices. Open the isolation valves. In Manual mode, fill the repaired area with liquid (or gas) and check for leaks. If the fitting leaks, ensure the fitting is tight. If the fitting still leaks, return to Step 3. Checking Fittings

Cabinet Cleaning Clean the cabinet after all other PM procedures are completed. Wear acid-resistant gloves, chemical safety goggles and full-face shield, and protective clothing such as a lab coat, apron, or coveralls as recommended in the MSDS. Rinse all chemical residue from the cabinet interior using the hand sprayers or wipes saturated in 10% IPA solution. Thoroughly dry the cabinet interior. Wipe the cabinet exterior clean. Dispose of all wipes according to site requirements and MSDS recommendations. Cabinet Cleaning

Home Module 1: Safety Module 2: System Overview

Similar presentations

Presentation on theme: "Home Module 1: Safety Module 2: System Overview"— Presentation transcript:

Similar presentations

About project

Feedback

Log in

Auth with social network:

Home Module 1: Safety Module 2: System Overview

Similar presentations

Presentation on theme: "Home Module 1: Safety Module 2: System Overview"— Presentation transcript:

Similar presentations

About project

Feedback