1. Substrate High Resolution Medium Resolution Substrate Substrate
X-ray Tube
(line focus)
Sample
Substrate
Flat Graphite Monochromator
X-ray Tube
Monochromator
Ge(440)
or Ge(220)
or Hybrid
Sample
Detector
Receiving
Slit
 = 0.5o
 = 5’’
or 12’’
or 19’’
2  2o
X-ray Mirror
 = 0.04o
Parallel Plate
Collimator
 = 0.5o
Perfect epitaxial layers
AlGaAs/GaAs
InGaAsP/InP
SiGe/Si
2 = 0.27o
Divergence
Slit
High Resolution
Substrate
Medium Resolution
Detector
X-ray Tube
(point focus)
Sample
Textured epitaxial layers
CdTe/GaAs
GaAs/Si
High Tc Superconductors
Flat Graphite Monochromator
Monochromator
Ge(440)
or Ge(220)
or Hybrid
Sample
 = 5’’
or 12’’
or 19’’
X-ray Tube
2 = 12’’
  0.3o
Parallel Plate
Collimator
Detector
Channel-cut
Ge(220) analyzer
Substrate
2 = 0.27o
Crossed Slit
Collimator
 = 0.5o
High Resolution
Textured polycrystalline layers
High Tc Superconductors
PtSi/Si
CoPd multilayers
Detector
Low Resolution
X-ray Tube
(point focus)
Sample
Detector
Crossed Slit
Collimator
  0.3o
Receiving
Slit
Substrate
Thin polycrystalline and amorphous layers +
random polycrystalline bulk samples
Low Resolution