1. MEMS Simulation and Modeling with SUGAR 2.0beta
Summary
Future
MEMS Simulation and Modeling with SUGAR 2.0beta
Jason Vaughn Clark, Ningning Zhou, David Bindel, James Demmel, Kris Pister
Berkeley Sensor and Actuator Center, University of California at Berkeley. Free on the web at
ALGORITHMS:
Transient analysis
Spice-like environment
Static analysis
Steady-state analysis
Sensitivity analysis
Netlist
ODE Models
Process Files
Simulation Engine
analyses: static,transient,
steadystate,sensitivity,modal
MODELS:
MEMS representation in SUGAR
Transformations
Accelerating Frames
Electrostatic Gap
Thermal Expansion
New nonlinear beam model & Plate model (prelim)
Excited plate (test)
Circles are theory. The red, blue, & green curves are nonlinear model
Sugar Model vs Theory
Model: piecewise continuous
Residual stress & strain gradient
RESULTS:
Transient response of a gap-closing actuator w
gap DY
T=600C
T=150C
Deflection dependence on Dgap & Dw
Within 0.5% error
Measured by B. Allen et al.
Dgap Dw
Optical Scanner Modes
KSJPister DY
The strain gradient shown here is two orders of magnitude larger than that of the BiMEMS process in order to visually display the doming of the backbone and the bending down of the fingers.
Subnets used for serpentine parameterization
GKFedder
w=1.8u
La,b
SUGAR 3032Hz
FEA 3032Hz
Experimental 2697Hz
Two-degree-of-freedom optical scanner prototype. Mode 1 = 739Hz, mode 2 = 745Hz.
K=0.0013N/m
K=0.0146N/m
K=0.27N/m
Within 1.2% of experimental
Measured by Fedder DL Dw
Level curves of serpentine stiffness
Dependence on DL & Dw
Netlist Parameterization