1. North America Regional Standards Committee (NA RSC)
Liaison Report
August 2010

2. Outline Current Structure of NA Standards Committees
NA Standards Staff Changes
NARSC West 2010 Meeting Highlights
Overall TC/WG Updates
Upcoming Events
Regional Staff Contact Information
August 2010
NARSC Liaison Report

3. NA Standards Staff Changes
Susan Turner was included in the recent staff reductions at SEMI.
Paul Trio
Sr. Manager, NA Standards Operations
Operations
Committees: I&C, ATE, NARSC
Meetings & Events Planning
General Information
New:
MEMS
Microlithography
STEPs/Workshops and Sponsorships
Ian McLeod
Manager, NA Standards Committees
Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / PIC
Metrics
Membership
Kevin Nguyen
Committees: Facilities / Gases / PV / PV Automation / Silicon Wafer
Traceability
August 2010
NARSC Liaison Report

4. Current Structure of the NARSC [1/2]
NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer)
Automated Test Equip Paul Roddy (Consultant) Ajay Khoche (Consultant)
Gases Tim Volin (Parker Hannifin)
Microlithography Wes Erck (W.Erck & Associates) Rick Silver (NIST)
Technical Architects Board (TAB) James Moyne (AMAT) Yaw Obeng (NIST)
Information & Control David Bricker (AMAT) Jack Ghiselli (Consultant) Lance Rist (ISMI)
Compounds Jim Oliver (Northrup Grumman) Russ Kremer (Freiberger)
PIC Mutaz Haddadin (Intel) Matt Fuller (Entegris)
EHS (NA) Chris Evanston (Salus Engineering) James Beasley (ISMI) Sean Larsen (Cymer) Eric Sklar (Safety Guru)
Liquid Chemicals Frank Flowers (FMC) Frank Parker (ICL Performance)
Photovoltaic Heiko Moritz (Caerus Systems) Win Baylies (BayTech Group)
MEMS / NEMS Win Baylies (BayTech Group) Dan Chilcott (Delphi) Mark Crockett (MEMSMART)
Silicon Wafer Noel Poduje (SMS) Dinesh Gupta (STA)
Facilities Phil Naughton (AMAT)
Traceability Win Baylies (BayTech Group) Yaw Obeng (NIST)
Metrics David Bouldin (Fab Consulting) Mark Frankfurth (Cymer)
FPD (NA) Bill Colbran (Engenuity)
New!
August 2010
NARSC Liaison Report

5. Current Structure of the NARSC [2/2]
NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer)
New!
FPD (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS)
EHS (Taiwan) Shuh-Woei Yu (SAHTECH) Fang-Ming Hsu (TSMC)
EHS WG (Korea) Seoung Jong Ko (Hynix) Hyunsuk Kim (Samsung Elec.)
FPD Metrology (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS)
FPD (Taiwan) Tzeng-Yow Lin (ITRI) Jia-Ming Liu (TDMDA)
New!
Facilities (Korea) Kwang Sun Kim (KUT) Insoo Cho (Shinsung ENG)
I&C (Taiwan) Robert Chien (TSMC)
Photovoltaic (Taiwan) Jeff Lee (Chroma) B.N. Chung (CMS/ITRI) Y.Y. Tsai (Delsolar) J.S. Chen (PVTC/ITRI) Ray Sung (UL Taiwan)
I&C (Korea) Chulhong Ahn (Hynix) Sammy Jeong (KC Tech) Gunwoo Lee (Miracom)
Regional Committees & Working Groups
August 2010
NARSC Liaison Report

6. NARSC SEMICON West 2010 Meeting (July 11)
Meeting Highlights:
Supported formation of the Korea Facilities Committee
Officially approved by the ISC at SEMICON West 2010
Supported formation of the Korea Information & Control Committee
Presentation:
Standardization opportunities in high-brightness LEDs (HB-LED’s) and solid state lighting (SSL)
August 2010
NARSC Liaison Report

7. NA Standards Meetings at SEMICON West 2010 (July 12-16)
Sunday
Monday
Tuesday
Wednesday
Thursday
Friday
Saturday 11 12 13 14 15 16 17
ATE
NARSC
EH&S
EH&S
Facilities & Gases
Information & Control
Liquid Chemicals
Schedule -at-a-glance
MEMS
Metrics
Microlitho
Photovoltaic
HB LED
Physical Interfaces & Carriers
Silicon Wafer
Traceability
August 2010
NARSC Liaison Report

8. Standards Technical Education Programs (July 13-15)
Sun
Mon
Tuesday
Wednesday
Thu
Fri
Sat 11 12 13 14 15 16 17
SEMI / SEMATECH: 3D Interconnect Challenges & Need for Standards
SEMI: PV TCO Film Depo & Characterization
SEMI / SEMATECH: Product and Equipment Time Metrics
SEMI/ISMI: e-Manufacturing
SEMI/NIST: PAIM III (Prod. Authentication & Info Mgmt
TechSITE South
Securing Your Spares
Wednesday, July 14
10:30-11:30 AM
Cancelled:
STG Courses: APC, EDA, PV2, RAMP
MEMS Reliability
August 2010
NARSC Liaison Report

9. Standards at SEMICON West 2010
Standards Awards and Networking Event (July 14)
* Award Recipients *
Karel Urbanek
Shoji Komatsu (Acteon)
Mutaz Haddadin (Intel)
Jackie Ferrell (ISMI)
NA Standards Merit Award
Lauren Crane (Applied Materials)
Cliff Greenberg (Nikon Precision)
NA Standards Leadership Award
Marty Burkhart (Hi Pure Tech)
Thomas Pomorski (Productivity Management Associates)
NA Standards Corporate Device Member Award
Mutaz Haddadin (Intel)
NA Standards Honor Award
John Stover (The Scatter Works)
NA Standards Educator Award
Win Baylies (BayTech Group)
August 2010
NARSC Liaison Report

10. Overall TC/WG Updates (from NA Standards West 2010 Meetings)
Org. Name
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
NA Automated Test Equipment Committee
July 14, 2010
(b) New Standard for Memory STDF (Standard Test Data Format) and G78 (wafer probe) withdrawal for C6-10. (o) Approved G84 (Strip Map Protocol) and G85 (Map Data Format) to go into inactive status.
NA Compound Semiconductor Materials Committee
May 19, 2010
(o) Next meeting planned for November To be hosted by Northrop Grumman in Baltimore, MD.
NA EHS Committee
July 16, 2010
(p) New Interlock Reliability TF chartered while Report Contents & Quality TF and Short Circuit Current Rating (SCCR) TF were disbanded. (b) E20 (EMO) removal ballot (#4954) passed TC review. (b) Coordinated S2 revision ballots for C6-10.
NA Facilities & Gases Committee
July 13, 2010
(p) New Pressure Measurement TF chartered.
(b) New guide for Heater Jacket (#4737) failed TC review and reballoted for C6-10.
(b) Several 5-Year Review docs balloted & reviewed at West.
NA I&C Committee
(b) GEM300 TF ballot 4824 (E5 revision) co-written with Korea A&I WG failed TC review. Reballot for C6-10.
August 2010
NARSC Liaison Report

11. Overall TC/WG Updates (from NA Standards West 2010 Meetings)
Org. Name
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
NA Liquid Chemicals Committee
July 13, 2010
(p) New temporary leader (Frank Parker, ICL) for Statistical Methods TF. (b) Several 5-Year Review documents balloted and reviewed. (b) New Standard on Surface Areas of Polymer Pellets (#4556) failed TC review. (b) F63 revision (ultra-pure water, #4953) balloted for C5-10.
NA MEMS / NEMS Committee
July 12, 2010
(b) MS3 rev ballot (MEMS terms, #4719) failed TC review. (o) New standard on microtube (#4691) and MS5 revision (wafer bond strength) to be balloted for C6-10.
NA Metrics Committee
July 14, 2010
(b) Doc 3847B (electromagnetic compatibility) failed TC review. (o) Approved new Standards activities on Cost of Ownership (COO) metrics for manufacturing equip (#5049) and gas delivery systems (#5050)
NA Microlithography Committee
(b) New standard for ‘EUV Reticle Reference Fiducial Marks’ (#4580) passed TC review. (b) P37 revision ballot (EUV Mask Substrates) for C7-10.
August 2010
NARSC Liaison Report

12. Overall TC/WG Updates (from NA Standards West 2010 Meetings)
Org. Name
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
NA PI&C Committee
July 14, 2010
(p) New 450 mm documents – MAC and FOSB Load Port – passed TC review. (p) E154 (450 mm Load Port) and E158 (450 mm FOUP) revision ballots passed TC review.
(o) New task force – International Reticle SMIF Pod and Load Port reliability TF.
NA PV Committee
(b) Several letter ballots submitted and reviewed at West including: bulk O2, Ar, H2, N2 passed TC review while new standard on virgin silicon feedstock for PV apps (#4805) failed TC review and reballoted for C5-10.
(b) PV1 revision (#5045) for C5-10.
NA Silicon Wafer Committee
July 13, 2010
(b) Several Five-Year Review documents balloted and reviewed at West including: wafer near-edge geometry using ROA (#4920, former M69) passed while 450 mm shipping box (#4760) failed TC review. (o) Patents identified related to MF1708 and MF1723
NA Traceability Committee
July 15, 2010
(b) SEMI T2/T6 withdrawal ballots and T8/T9 revision ballots passed TC review. (b) Authorized nfo ballots on Organizational Identification (#4845) and Authentication Svc Body Traceability (#4847).
August 2010
NARSC Liaison Report

13. NA Standards Fall 2010 Meetings November 8-11
Most Standards meetings will be held at SEMI Headquarters in San Jose, CA
Facilities & Gases
Information & Control
Liquid Chemicals
MEMS
Metrics
PIC PV
Traceability
August 2010
NARSC Liaison Report

14. NA Standards Fall 2010 Meetings November 8-11
Other hosting locations
AMAT (Santa Clara)
EHS
Intel (Santa Clara)
Silicon Wafer
August 2010
NARSC Liaison Report

15. NA Standards Fall 2010 Meetings November 8-11
Sunday
Monday
Tuesday
Wednesday
Thursday
Friday
Saturday 7 8 9 10 11 12 13
NARSC
EH&S
Information & Control
Liquid Chemicals
Metrics
Photovoltaic
Traceability
Facilities & Gases
MEMS
Physical Interfaces & Carriers
Silicon Wafer
Locations
- SEMI
- AMAT
- Intel
- Hynix
August 2010
NARSC Liaison Report

16. NA Compound Semiconductor Materials Committee
Upcoming NA Meetings
Event Name
Event Type
Contents
NA Compound Semiconductor Materials Committee
Committee Meeting
November 2010
Northrop Grumman in Baltimore, Maryland
August 2010
NARSC Liaison Report

17. 3081 Zanker Road San Jose, CA 95134 U.S.A.
Regional Staff Contact Information
Name
Paul Trio
Phone
Office Address
3081 Zanker Road San Jose, CA U.S.A.
Committees
In charge
NARSC Automated Test Equipment / Information & Control / MEMS / Microlithography
August 2010
NARSC Liaison Report

18. Back-up
August 2010
NARSC Liaison Report