1. Japan PV Committee Liaison Report
For Taiwan PV Committee Meeting on Sept. 9, 2009
Co-chairs
Japan PV Committee
2018/11/12
Event, Venue information

2. Japan PC Committee History
Sept. 30, “SEMI PV Forum”
Concept: Standardization strategy for manufacturing
Had over 30 attendees, including PV cell manufacturers and equipment suppliers, as well as experienced SEMI Standards members
Dec. 4, “PV Committee Preparatory Meeting”
Attendees from PV Cell Manufacturers, Poly Si suppliers, Equipment suppliers
Unanimously agreed to form Japan PV Committee
April 13, “Petition to JRSC Meeting”
JRSC unanimously agreed to make a recommendation of forming Japan PV Committee to ISC
April 23, “Japan PV Committee Kick-off Meeting”
TFOF for “PV Equipment Interface Specification (PV-EIS) TF” was approved
“Start Up Forum” was formed to focus on areas for “Material”, “AMHS” and “Safety”
May 30, ISC approval
ISC approved formation of Japan PV Committee
June 26, “Japan PV Committee Meeting” in conjunction with PV Japan 2009
1st scheduled committee meeting after formally approved by ISC

3. Organization of Japan PV Committee
Startup Forum
PV-EIS TF
Material SG
AMHS SG
Safety SG

4. Committee Leadership Committee co-chairs Hiromu Takatsuka
Mitsubishi Heavy Industry (User: PV Cell/Module Maker)
Kazuhiko Kashima
Covallent Materials (Supplier: Silicon Material)
Terry Asakawa
Tokyo Electron (Supplier: Equipment)

5. Member composition by the industrial sectors (as of Sep. 1)
# of PV TC Members
(in Japan region)
# of Companies
Component/Others 14 10
Processing/Module Equipment 7
Inspection/Measurement/Other Tool 6 5
AMHS
Service Provider/Special Interest
Cell/Module 4
Poly silicone 3
Wafer 2
Carrier
Univ./Research Institute
FPD Panel 1
Gas/Chemical
Total 66 50 5

6. TF Activity PV-Equipment I/F System (EIS) TF (1/2)
Leader
Mitch Sakamoto (Tokyo Electron)
Kicked-off on June 9, 2009
Discussed what to focus on
Reviewed SEMI PV2, Guide for PV Equipment Communication Interfaces (PVECI)
Charter
Study and development of standards for equipment communication interface for photovoltaic (PV) production systems
The study will lead the standards optimized to reduce costs with well-fit definitions to the requirement of real manufacturing operation
This task force is liaison part of European PV – EIS Task Force
Note: Global Task Force needs to be established

7. TF Activity PV-Equipment I/F System (EIS) TF (2/2)
2nd TF Meeting (July 23)
TF started discussion on creating a new Guide standard
Title: Guide for PV Information and Control Management - Architecture and Requirement for Equipment Integration
Draft including, Rationale, Purpose, Scope is under discussion
3rd TF Meeting (August 20)
Reviewed feedback from EU PV-EIS TF
Discussed on;
“Horizontal Communication” (Communication amongst manufacturing equipments)
Material handoff/handshake – following SEMI FPD Standards might be able to cover the requirement of handshake, specially for glass based (thin film) manufacturing
SEMI D51 (Specification for Handshake Method of Single Substrate for HANDLING OFF/ON Tool in FPD Production)
SEMI D54 (Specification for Substrate Management of FPD Production <SMS-FPD>) 7

8. Study Group (SG) Activity
START UP FORUM
Already met 4 times
Has been sharing progress/issues raised by TF and SGs
Has been interested in “PV A-C (anti-counterfeit)” issue
In association with Traceability Committee leaders involved in PV Committee
Material/Metrics SG
Already met 3 times
Has been sharing issues including “Traceability”, “Collaboration with Test Method TF in Silicon Wafer Committee” and “Glass substrate”
To propose TFOF for forming “Japan PV Materials Task Force” at next committee meeting on Sept.15

9. Abstract from Last Committee Meeting (June 26) (1/2)
Explanation of SEMI Standards (for beginners)
Reports from TF and SGs
PV-EIS TF
Reviewed PV2-0709, GUIDE FOR PV EQUIPMENT COMMUNICATION INTERFACES (PVECI)
Reproduced basic communication capabilities based on SESC
Need to develop a standard that covers Operational Models?
Will expand to a Global TF activity
TF shortly needs to identify where to focus on
MES for automatic substrate handling is really required by PV industry?
QA for Processing Equipment might be necessary
Safety SG
To hold a SG meeting to review S , ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR FPD MANUFACTURING SYSTEM
SG to consider if Appendix/Related Information to S26 will be necessary for PV industry

10. Abstract from Last Committee Meeting (June 26) (2/2)
Reports from TF and SGs (cont.)
Material/Metrology SG
SG has been considering focusing on
the necessity for traceability
possibility of cooperation with the Test Method TF of Silicon Wafer Committee
Standardization of PV module materials including glass
Material Handling SG
Learning from FPD Standards, need participation of experts of PV industry
Next committee meeting
Sept. 15, Japan (Japan Fall Standards Meetings)

11. Backup

12. “SEMI Standards Workshop” (PVJapan 2009)
Date:
June 26, 2009 (13:30-15:00)
Venue:
Makuhari Messe, Int’l Conference Hall Room #301
Program Chairs:
Hiromu Takatsuka
Mitsubishi Heavy Industry
Terry Asakawa
Tokyo Electron
Agenda:
“Standardization of Silicon Material Quality for PV Manufacturing”
presented by Kazuhiko Kashima/Covalent Materials
“Introduction of SEMI Safety Guidelines applicable to PV area”
presented by Supika Mashiro/Canon ANELVA
“Published SEMI Standards available for PV Manufacturing Equipment”
presented by Yoshihisa Shin/System-V
Drew 110+ attendees

13. JRSC (Japan Regional Standards Committee) as of Sept. 1, 2009
Co-Chair: Shigeru Kobayashi (Renesas Technology)
Co-Chair: Makoto Yamamoto (Muratec Automation)
Vice Chair: Supika Mashiro (Canon ANELVA)
Standardization Process
Integration (SPI)
Supika Mashiro (Canon ANELVA)
Coordination Group
I&C Committee
Mitsune Sakamoto (TEL)
Takayuki Nishimura (DNS)
Silicon Wafer
Committee
Naoyuki Kawai
(Renesas Technology)
Toshio Naritomi (SUMCO)
EHS Committee
Hidetoshi Sakura (Intel)
Supika Mashiro
(Canon ANELVA)
Moray Crawford
(Hatsuta Seisakusho）
FPD
Factory Automation
Committee
Yasunobu Otogawa (Daihen)
Harumichi Hirose
(Shibaura Mechatronics)
FPD
Coordination Group
Yoshitada Nogami
(SK Electronics)
Makoto Yamamoto (Muratec Automation)
PI&C Committee
Shoji Komatsu (Acteon)
Kenjiro Nawa (TEL)
Akira Kashimoto
(Shin-Etsu Polymer)
Compound
Semiconductor
Materials Committee
Masayoshi Obara (SEH)
TBD
Gases & Facilities
Committee
Hiromichi Enami
(Hitachi High-Technologies
Isao Suzuki (MKS Japan)
FPD
Color Filter&Optical
Elements Committee
Hisashi Aruga (Seiko Epson)
Tadahiro Furukawa
(Kyodo Printing)
Hiromitsu Itoh (Toppan Printing)
FPD
Meteorology Committee
Shinsuke Katoh (Sharp)
Ryoichi Watanabe
(Toshiba Movile Display)
Yuji Yoda
(Otsuka Electronics)
Metrics Committee
Hisao Kuroda (MES AFTY)
Mikio Furukawa
(Shin-Etsu Polymer)
Packaging Committee
Kazunori Kato (AiT)
Haruo Tabata (Osaka Univ.)
Yutaka Koma (Advisor)
Liquid Chemicals
Committee
Hiroshi Tomita (Toshiba)
PV Committee
Hiromu Takatsuka
(MITSUBISHI HEAVY
INDUSTORIES)
Kazuhiko Kashima
(Covalent Materials)
Terry Asakawa (TEL)
FPD Mask Committee
Atsushi Okazaki
(SK-Electronics)
Traceability Committee
Michio Honma (NEC EL)
Yasuji Nakamura (Yaskawa Electric)
Test Committee
Hiroshi Kaga
(NECEL)
Hidetoshi Aibara
(Yokogawa Electric)
Micropatterning
Committee
Iwao Higashikawa (Toshiba)