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The Behavior and Properties of New Piezoelectric Crystals at High Temperature (150 to 900C)
Maurício Pereira da Cunha Dept. of Electrical & Computer Engineering Lab. for Surface Science and Technology University of Maine, Orono, ME, 04469 Major efforts: extraction of langatate acoustic constants from high temperature (HT) measurements; establishment of thin film electrodes to withstand temperature up to 1000°C; surface acoustic wave (SAW) device fabrication and test up to 1000°C; and investigation of temperature behavior of selected orientations. Cutting LGT boule to a specific orientation. Measurement & extraction of acoustic constants up to 1100°C using Resonant Ultrasound Spectroscopy (RUS) Cross section of layered HT electrode Wafers before and after optical polishing HT SAW electrodes and devices RUS system and furnace at UMaine Calculation of SAW properties for temperature behavior characterization Furnace for testing devices SAW long-term, 6 month Tracking a resonant peak with varying temperature Fabricated SAW devices to verify temperature behavior of selected orientation
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