1. MEMS Simulation and Modeling with SUGAR 1.1
Summary
Future
MEMS Simulation and Modeling with SUGAR 1.1
Jason Vaughn Clark, Ningning Zhou, David Bindle, James Demmel, Kris Pister
Berkeley Sensor and Actuator Center, University of California at Berkeley. Free on the web at
ALGORITHMS:
Transient analysis
Steady-state analysis
Sensitivity analysis
Spice-like environment
Static analysis
Netlist
ODE Models
Process Files
Simulation Engine
Analyses: Static,Transient,
Steady-tate,Sensitivity,Modal
MODELS:
MEMS representation in SUGAR
Transformations
Accelerating Frames
Electrostatic Gap
Thermal Expansion
Nonlinear beam model
Residual stress & strain gradient
RESULTS: