1. Active MEMS for Wireless and Optical Space Communications
NASA Space Communications
Active MEMS for Wireless and Optical Space Communications
Principal Investigators: Frank Merat, Stephen Phillips
Case Western Reserve University

2. Active MEMS for Communications
Project Overview
Design MEMS focusing mirrors with electrostatic actuated pointing mechanisms. Develop batch microfabrication processes. Produce and test devices.
100 m

3. Active MEMS for Communications
Relevance and Impact
Relevance:
This technology has applications in access and proximity networks. Planetary exploration missions are the primary targets where:
1. Access networks are used for communications between satellites and surface vehicles.
2. Proximity networks are used for communications between surface vehicles.
Impact:
Mass produced MEMS based transmitters and receivers for optical links in proximity and access networks promise:
1. Reduced manufacturing costs
2. Reduced system mass

4. Active MEMS for Communications
Technical Accomplishments m p D Ñ
-300
-200
-100
100
200
300
700
800
900
1000
1100
1200
tensile
compressive
as-deposited
Annealing Temperature (C)
Stress (MPa)
570
615
MultiPoly
Film Stress (MPa)
570 C
615 C
Film Thickness (µm, from SiO2 interface)

5. Active MEMS for Communications
Technical Accomplishments