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3 Mukhopadhyay et al, A SOI-MEMS-based 3-DOF planar-kinematics nanopositioning stage 18um deflection, 1.72 degree rotation, 85V

4 http://ldcn. newcastle. edu

5 [4] J. E.-Y. Lee, J. Yan, and A. A. Seshia, "Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator," J. Micromech. Microeng., vol. 19, article , Jul. 2009 Q=3.6 million 

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