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Integrated Microsystem

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Presentation on theme: "Integrated Microsystem"— Presentation transcript:

1 Integrated Microsystem
Cells in, data out Lyse Separate Detect Model and Predict Protein expression assays by conventional methods typically require ~ 106 cells. An integrated system can reduce this by orders of magnitude

2 Detecting mass with a resonator
Micromechanical resonator w2 = m k Water w2 = m+mI k mI in water ~ times greater than m Quality factor in liquid is near unity Sample Resonance frequency: Dw Frequency Amplitude Dw Gravimetric detection principle: mass sensor with immobilized receptors df/f=-1/2 dm/m in vacuum: sensitivity limited by thermomechanical noise: limit?? problems: physical: damping & large effective mass reduce sensitivity in liquid dramatically technical: actuation & readout more difficult in conductive liquid Amplitude Frequency Viscous damping from solution severely degrades mass resolution

3 The Suspended Microchannel Resonator
Confining the fluid to the inside of the resonator eliminates viscous drag Dw Hollow resonator (concept) mass sensitivity only determined by ratio of surface area to total mass (explain) can be operated in vacuum Burg and Manalis, Applied Physics Letters 2003

4 500 nm 100 mm

5 Quality factor is independent of medium
No viscous damping Quality factor is independent of medium

6 Biomolecular Detection
10-17 g/mm2 Burg and Manalis, Applied Physics Letters 2003

7 How sensitive is the suspended microchannel detector?
V~10 pL V>10 mL Quartz Crystal mBalance Assume protein mass of 100 kD

8 Large-scale commercial manufacturing...
...with Innovative Micro Technology


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