1. MEMS Devices for Studying Insect Biomechanics
3-Axis ground reaction force measurements for cockroach running
Sensor design and fabrication
Characterization and preliminary results
Future Work
Complete sensor characterization
Application to smaller insects

2. Insect Measurement Estimated Requirements
Camponotus
modici
1cm
Drosophila
melanogaster
1mm
Insect
Sensor Performance
Blaberus discoidalis

3. Wafer Layout and Sensor Geometry
Sensor Design
Wafer Layout and Sensor Geometry
10cm wafer
5mm sensor pad

4. Flexure Geometry and Instrumentation
Sensor Design
Flexure Geometry and Instrumentation

5. SEM Images – Sensor Features
Sensor Design
SEM Images – Sensor Features

6. Sensor Characterization
Static normal load testing
Performance
Un-amplified sensitivity: ~1.2V/N
Minimum resolvable force: ~7mN
Mechanical bandwidth: ~4kHz

7. Sensor Characterization
Piezoelectric actuator tests
Sensor output vs. load placement
Bottom Left
Top Left
Bottom Right
Top Right
Bottom Right
Top Right
Bottom Left
Top Left

8. Future Work Continue sensor characterization Insect measurements
In-plane force sensitivity assessment
Dynamic/resonant mode excitation
Refine data reduction model
Insect measurements
Cockroach running experiments: ground reaction forces (B. discoidalis)
Ant experiments: ground reaction, other interesting measurements? (C. modici)